9/13/2010	10:25:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/13/2010	10:25:23 AM	Recipe started at 10:25 AM
9/13/2010	10:25:23 AM	H2 valve closed
9/13/2010	10:25:23 AM	BCl3 valve closed
9/13/2010	10:25:23 AM	PH3 valve closed
9/13/2010	10:25:23 AM	SiCl4 pre valve closed
9/13/2010	10:25:23 AM	SiCl4 post valve closed
9/13/2010	10:25:23 AM	Main Vac valve closed
9/13/2010	10:25:23 AM	Bypass valve closed
9/13/2010	10:25:23 AM	Bubbler valve closed
9/13/2010	10:25:23 AM	Helium valve opened
9/13/2010	10:25:23 AM	Helium MFC set to  500.000000
9/13/2010	10:25:23 AM	H2 MFC set to  0.000000
9/13/2010	10:25:23 AM	BCl3 MFC set to  0.000000
9/13/2010	10:25:23 AM	PHl3 MFC set to  0.000000
9/13/2010	10:25:23 AM	SiCl4 MFC set to  0.000000
9/13/2010	10:25:23 AM	Bypass solenoid MFC set to  0.000000
9/13/2010	10:25:23 AM	Tube furnace set to 0
9/13/2010	10:27:43 AM	Run aborted at 10:27 AM
9/13/2010	10:27:43 AM	Helium valve closed
9/13/2010	10:27:43 AM	H2 valve closed
9/13/2010	10:27:43 AM	BCl3 valve closed
9/13/2010	10:27:43 AM	PH3 valve closed
9/13/2010	10:27:43 AM	SiCl4 pre valve closed
9/13/2010	10:27:43 AM	SiCl4 post valve closed
9/13/2010	10:27:43 AM	Bypass valve closed
9/13/2010	10:27:43 AM	Main Vac valve closed
9/13/2010	10:27:43 AM	Bubbler valve closed
9/13/2010	10:27:43 AM	Helium MFC set to  0.000000
9/13/2010	10:27:43 AM	H2 MFC set to  0.000000
9/13/2010	10:27:43 AM	BCl3 MFC set to  0.000000
9/13/2010	10:27:43 AM	PHl3 MFC set to  0.000000
9/13/2010	10:27:43 AM	SiCl4 MFC set to  0.000000
9/13/2010	10:27:43 AM	Tube furnace set to 0
9/13/2010	10:27:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/13/2010	10:27:44 AM	Helium valve opened
9/13/2010	10:27:45 AM	Helium valve closed
9/13/2010	10:27:46 AM	Helium valve opened
9/13/2010	10:27:46 AM	Helium valve closed
9/13/2010	10:27:47 AM	Helium valve opened
9/13/2010	10:27:47 AM	Helium valve closed
9/13/2010	10:31:36 AM	Helium valve opened
9/13/2010	10:31:36 AM	Helium valve closed
9/13/2010	10:31:37 AM	Helium valve opened
9/13/2010	10:31:37 AM	Helium valve closed
9/13/2010	10:31:37 AM	Helium valve opened
9/13/2010	10:31:37 AM	Helium valve closed
9/13/2010	10:31:37 AM	Helium valve opened
9/13/2010	10:31:38 AM	Helium valve closed
9/13/2010	10:31:38 AM	Helium valve opened
9/13/2010	10:31:38 AM	Helium valve closed
9/13/2010	10:31:38 AM	Helium valve opened
9/13/2010	10:31:38 AM	Helium valve closed
9/13/2010	10:31:38 AM	Helium valve opened
9/13/2010	10:31:39 AM	Helium valve closed
9/13/2010	10:31:39 AM	Helium valve opened
9/13/2010	10:31:39 AM	Helium valve closed
9/13/2010	10:31:39 AM	Helium valve opened
9/13/2010	10:31:39 AM	Helium valve closed
9/13/2010	10:31:40 AM	Helium valve opened
9/13/2010	10:31:41 AM	Helium valve closed
9/13/2010	10:31:41 AM	Helium valve opened
9/13/2010	10:31:42 AM	Helium valve closed
9/13/2010	10:31:43 AM	Helium valve opened
9/13/2010	10:31:43 AM	Helium valve closed
9/13/2010	10:41:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/13/2010	10:41:47 AM	Recipe started at 10:41 AM
9/13/2010	10:41:47 AM	H2 valve closed
9/13/2010	10:41:47 AM	BCl3 valve closed
9/13/2010	10:41:47 AM	PH3 valve closed
9/13/2010	10:41:47 AM	SiCl4 pre valve closed
9/13/2010	10:41:47 AM	SiCl4 post valve closed
9/13/2010	10:41:47 AM	Main Vac valve closed
9/13/2010	10:41:47 AM	Bypass valve closed
9/13/2010	10:41:47 AM	Bubbler valve closed
9/13/2010	10:41:47 AM	Helium valve opened
9/13/2010	10:41:47 AM	Helium MFC set to  500.000000
9/13/2010	10:41:47 AM	H2 MFC set to  0.000000
9/13/2010	10:41:47 AM	BCl3 MFC set to  0.000000
9/13/2010	10:41:47 AM	PHl3 MFC set to  0.000000
9/13/2010	10:41:47 AM	SiCl4 MFC set to  0.000000
9/13/2010	10:41:47 AM	Bypass solenoid MFC set to  0.000000
9/13/2010	10:41:47 AM	Tube furnace set to 0
9/13/2010	10:43:05 AM	Helium valve closed
9/13/2010	10:43:05 AM	H2 valve closed
9/13/2010	10:43:05 AM	BCl3 valve closed
9/13/2010	10:43:05 AM	PH3 valve closed
9/13/2010	10:43:05 AM	SiCl4 pre valve closed
9/13/2010	10:43:05 AM	SiCl4 post valve closed
9/13/2010	10:43:05 AM	Main Vac valve closed
9/13/2010	10:43:05 AM	Bypass valve closed
9/13/2010	10:43:05 AM	Bubbler valve closed
9/13/2010	10:43:05 AM	Helium MFC set to  0.000000
9/13/2010	10:43:05 AM	H2 MFC set to  0.000000
9/13/2010	10:43:05 AM	BCl3 MFC set to  0.000000
9/13/2010	10:43:05 AM	PHl3 MFC set to  0.000000
9/13/2010	10:43:05 AM	SiCl4 MFC set to  0.000000
9/13/2010	10:43:05 AM	Bypass solenoid MFC set to  0.000000
9/13/2010	10:43:05 AM	Tube furnace set to 0
9/13/2010	10:43:06 AM	Run finished at 10:43 AM
9/13/2010	10:43:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/13/2010	10:56:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/13/2010	10:56:09 AM	Recipe started at 10:56 AM
9/13/2010	10:56:09 AM	Helium valve closed
9/13/2010	10:56:09 AM	H2 valve closed
9/13/2010	10:56:09 AM	BCl3 valve closed
9/13/2010	10:56:09 AM	PH3 valve closed
9/13/2010	10:56:09 AM	SiCl4 pre valve closed
9/13/2010	10:56:09 AM	SiCl4 post valve closed
9/13/2010	10:56:09 AM	Main Vac valve closed
9/13/2010	10:56:09 AM	Bubbler valve closed
9/13/2010	10:56:09 AM	Bypass valve opened
9/13/2010	10:56:09 AM	Helium MFC set to  0.000000
9/13/2010	10:56:09 AM	H2 MFC set to  0.000000
9/13/2010	10:56:09 AM	BCl3 MFC set to  0.000000
9/13/2010	10:56:09 AM	PHl3 MFC set to  0.000000
9/13/2010	10:56:09 AM	SiCl4 MFC set to  0.000000
9/13/2010	10:56:09 AM	Bypass solenoid MFC set to  0.000000
9/13/2010	10:56:09 AM	Tube furnace set to 0
9/13/2010	10:56:50 AM	Helium valve closed
9/13/2010	10:56:50 AM	H2 valve closed
9/13/2010	10:56:50 AM	BCl3 valve closed
9/13/2010	10:56:50 AM	PH3 valve closed
9/13/2010	10:56:50 AM	SiCl4 pre valve closed
9/13/2010	10:56:50 AM	SiCl4 post valve closed
9/13/2010	10:56:50 AM	Bubbler valve closed
9/13/2010	10:56:50 AM	Main Vac valve opened
9/13/2010	10:56:50 AM	Bypass valve opened
9/13/2010	10:56:50 AM	Helium MFC set to  0.000000
9/13/2010	10:56:50 AM	H2 MFC set to  0.000000
9/13/2010	10:56:50 AM	BCl3 MFC set to  0.000000
9/13/2010	10:56:50 AM	PHl3 MFC set to  0.000000
9/13/2010	10:56:50 AM	SiCl4 MFC set to  0.000000
9/13/2010	10:56:50 AM	Bypass solenoid MFC set to  0.000000
9/13/2010	10:56:50 AM	Tube furnace set to 0
9/13/2010	10:56:51 AM	Run finished at 10:56 AM
9/13/2010	10:56:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/13/2010	10:57:38 AM	Tube furnace set to 80
9/13/2010	10:58:01 AM	Bypass valve closed
9/13/2010	10:58:04 AM	Main Vac valve closed
9/13/2010	10:58:15 AM	Main Vac valve opened
9/13/2010	10:58:18 AM	Bypass valve opened
9/13/2010	11:27:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/13/2010	11:27:24 AM	Recipe started at 11:27 AM
9/13/2010	11:27:24 AM	Helium valve closed
9/13/2010	11:27:24 AM	H2 valve closed
9/13/2010	11:27:24 AM	BCl3 valve closed
9/13/2010	11:27:24 AM	PH3 valve closed
9/13/2010	11:27:24 AM	SiCl4 pre valve closed
9/13/2010	11:27:24 AM	SiCl4 post valve closed
9/13/2010	11:27:24 AM	Main Vac valve closed
9/13/2010	11:27:24 AM	Bubbler valve closed
9/13/2010	11:27:24 AM	Bypass valve opened
9/13/2010	11:27:24 AM	Helium MFC set to  0.000000
9/13/2010	11:27:24 AM	H2 MFC set to  0.000000
9/13/2010	11:27:24 AM	BCl3 MFC set to  0.000000
9/13/2010	11:27:24 AM	PHl3 MFC set to  0.000000
9/13/2010	11:27:24 AM	SiCl4 MFC set to  0.000000
9/13/2010	11:27:24 AM	Bypass solenoid MFC set to  0.000000
9/13/2010	11:27:24 AM	Tube furnace set to 0
9/13/2010	11:27:25 AM	Helium valve closed
9/13/2010	11:27:25 AM	H2 valve closed
9/13/2010	11:27:25 AM	BCl3 valve closed
9/13/2010	11:27:25 AM	PH3 valve closed
9/13/2010	11:27:25 AM	SiCl4 pre valve closed
9/13/2010	11:27:25 AM	SiCl4 post valve closed
9/13/2010	11:27:25 AM	Bubbler valve closed
9/13/2010	11:27:25 AM	Main Vac valve opened
9/13/2010	11:27:25 AM	Bypass valve opened
9/13/2010	11:27:25 AM	Helium MFC set to  0.000000
9/13/2010	11:27:25 AM	H2 MFC set to  0.000000
9/13/2010	11:27:25 AM	BCl3 MFC set to  0.000000
9/13/2010	11:27:25 AM	PHl3 MFC set to  0.000000
9/13/2010	11:27:25 AM	SiCl4 MFC set to  0.000000
9/13/2010	11:27:25 AM	Bypass solenoid MFC set to  0.000000
9/13/2010	11:27:25 AM	Tube furnace set to 0
9/13/2010	11:28:25 AM	H2 valve closed
9/13/2010	11:28:25 AM	BCl3 valve closed
9/13/2010	11:28:25 AM	PH3 valve closed
9/13/2010	11:28:25 AM	SiCl4 pre valve closed
9/13/2010	11:28:25 AM	SiCl4 post valve closed
9/13/2010	11:28:25 AM	Bubbler valve closed
9/13/2010	11:28:25 AM	Helium valve opened
9/13/2010	11:28:25 AM	Main Vac valve opened
9/13/2010	11:28:25 AM	Bypass valve opened
9/13/2010	11:28:25 AM	Helium MFC set to  100.000000
9/13/2010	11:28:25 AM	H2 MFC set to  0.000000
9/13/2010	11:28:25 AM	BCl3 MFC set to  0.000000
9/13/2010	11:28:25 AM	PHl3 MFC set to  0.000000
9/13/2010	11:28:25 AM	SiCl4 MFC set to  0.000000
9/13/2010	11:28:25 AM	Bypass solenoid MFC set to  0.000000
9/13/2010	11:28:25 AM	Tube furnace set to 0
9/13/2010	11:29:25 AM	Helium valve closed
9/13/2010	11:29:25 AM	H2 valve closed
9/13/2010	11:29:25 AM	BCl3 valve closed
9/13/2010	11:29:25 AM	PH3 valve closed
9/13/2010	11:29:25 AM	SiCl4 pre valve closed
9/13/2010	11:29:25 AM	SiCl4 post valve closed
9/13/2010	11:29:25 AM	Bubbler valve closed
9/13/2010	11:29:25 AM	Main Vac valve opened
9/13/2010	11:29:25 AM	Bypass valve opened
9/13/2010	11:29:25 AM	Helium MFC set to  0.000000
9/13/2010	11:29:25 AM	H2 MFC set to  0.000000
9/13/2010	11:29:25 AM	BCl3 MFC set to  0.000000
9/13/2010	11:29:25 AM	PHl3 MFC set to  0.000000
9/13/2010	11:29:25 AM	SiCl4 MFC set to  0.000000
9/13/2010	11:29:25 AM	Bypass solenoid MFC set to  0.000000
9/13/2010	11:29:25 AM	Tube furnace set to 0
9/13/2010	11:30:25 AM	H2 valve closed
9/13/2010	11:30:25 AM	BCl3 valve closed
9/13/2010	11:30:25 AM	PH3 valve closed
9/13/2010	11:30:25 AM	SiCl4 pre valve closed
9/13/2010	11:30:25 AM	SiCl4 post valve closed
9/13/2010	11:30:25 AM	Bubbler valve closed
9/13/2010	11:30:25 AM	Helium valve opened
9/13/2010	11:30:25 AM	Main Vac valve opened
9/13/2010	11:30:25 AM	Bypass valve opened
9/13/2010	11:30:25 AM	Helium MFC set to  100.000000
9/13/2010	11:30:25 AM	H2 MFC set to  0.000000
9/13/2010	11:30:25 AM	BCl3 MFC set to  0.000000
9/13/2010	11:30:25 AM	PHl3 MFC set to  0.000000
9/13/2010	11:30:25 AM	SiCl4 MFC set to  0.000000
9/13/2010	11:30:25 AM	Bypass solenoid MFC set to  0.000000
9/13/2010	11:30:26 AM	Tube furnace set to 0
9/13/2010	11:31:26 AM	Helium valve closed
9/13/2010	11:31:26 AM	H2 valve closed
9/13/2010	11:31:26 AM	BCl3 valve closed
9/13/2010	11:31:26 AM	PH3 valve closed
9/13/2010	11:31:26 AM	SiCl4 pre valve closed
9/13/2010	11:31:26 AM	SiCl4 post valve closed
9/13/2010	11:31:26 AM	Bubbler valve closed
9/13/2010	11:31:26 AM	Main Vac valve opened
9/13/2010	11:31:26 AM	Bypass valve opened
9/13/2010	11:31:26 AM	Helium MFC set to  0.000000
9/13/2010	11:31:26 AM	H2 MFC set to  0.000000
9/13/2010	11:31:26 AM	BCl3 MFC set to  0.000000
9/13/2010	11:31:26 AM	PHl3 MFC set to  0.000000
9/13/2010	11:31:26 AM	SiCl4 MFC set to  0.000000
9/13/2010	11:31:26 AM	Bypass solenoid MFC set to  0.000000
9/13/2010	11:31:26 AM	Tube furnace set to 0
9/13/2010	11:32:26 AM	H2 valve closed
9/13/2010	11:32:26 AM	BCl3 valve closed
9/13/2010	11:32:26 AM	PH3 valve closed
9/13/2010	11:32:26 AM	SiCl4 pre valve closed
9/13/2010	11:32:26 AM	SiCl4 post valve closed
9/13/2010	11:32:26 AM	Bubbler valve closed
9/13/2010	11:32:26 AM	Helium valve opened
9/13/2010	11:32:26 AM	Main Vac valve opened
9/13/2010	11:32:26 AM	Bypass valve opened
9/13/2010	11:32:26 AM	Helium MFC set to  100.000000
9/13/2010	11:32:26 AM	H2 MFC set to  0.000000
9/13/2010	11:32:26 AM	BCl3 MFC set to  0.000000
9/13/2010	11:32:26 AM	PHl3 MFC set to  0.000000
9/13/2010	11:32:26 AM	SiCl4 MFC set to  0.000000
9/13/2010	11:32:26 AM	Bypass solenoid MFC set to  0.000000
9/13/2010	11:32:26 AM	Tube furnace set to 0
9/13/2010	11:33:26 AM	Helium valve closed
9/13/2010	11:33:26 AM	H2 valve closed
9/13/2010	11:33:26 AM	BCl3 valve closed
9/13/2010	11:33:26 AM	PH3 valve closed
9/13/2010	11:33:26 AM	SiCl4 pre valve closed
9/13/2010	11:33:26 AM	SiCl4 post valve closed
9/13/2010	11:33:26 AM	Bubbler valve closed
9/13/2010	11:33:26 AM	Main Vac valve opened
9/13/2010	11:33:26 AM	Bypass valve opened
9/13/2010	11:33:26 AM	Helium MFC set to  0.000000
9/13/2010	11:33:26 AM	H2 MFC set to  0.000000
9/13/2010	11:33:26 AM	BCl3 MFC set to  0.000000
9/13/2010	11:33:26 AM	PHl3 MFC set to  0.000000
9/13/2010	11:33:26 AM	SiCl4 MFC set to  0.000000
9/13/2010	11:33:26 AM	Bypass solenoid MFC set to  0.000000
9/13/2010	11:33:26 AM	Tube furnace set to 0
9/13/2010	11:34:26 AM	H2 valve closed
9/13/2010	11:34:26 AM	BCl3 valve closed
9/13/2010	11:34:26 AM	PH3 valve closed
9/13/2010	11:34:26 AM	SiCl4 pre valve closed
9/13/2010	11:34:26 AM	SiCl4 post valve closed
9/13/2010	11:34:26 AM	Bubbler valve closed
9/13/2010	11:34:26 AM	Helium valve opened
9/13/2010	11:34:26 AM	Main Vac valve opened
9/13/2010	11:34:26 AM	Bypass valve opened
9/13/2010	11:34:26 AM	Helium MFC set to  100.000000
9/13/2010	11:34:26 AM	H2 MFC set to  0.000000
9/13/2010	11:34:26 AM	BCl3 MFC set to  0.000000
9/13/2010	11:34:26 AM	PHl3 MFC set to  0.000000
9/13/2010	11:34:26 AM	SiCl4 MFC set to  0.000000
9/13/2010	11:34:26 AM	Bypass solenoid MFC set to  0.000000
9/13/2010	11:34:26 AM	Tube furnace set to 0
9/13/2010	11:35:26 AM	Helium valve closed
9/13/2010	11:35:26 AM	H2 valve closed
9/13/2010	11:35:26 AM	BCl3 valve closed
9/13/2010	11:35:26 AM	PH3 valve closed
9/13/2010	11:35:26 AM	SiCl4 pre valve closed
9/13/2010	11:35:26 AM	SiCl4 post valve closed
9/13/2010	11:35:26 AM	Bubbler valve closed
9/13/2010	11:35:26 AM	Main Vac valve opened
9/13/2010	11:35:26 AM	Bypass valve opened
9/13/2010	11:35:26 AM	Helium MFC set to  0.000000
9/13/2010	11:35:26 AM	H2 MFC set to  0.000000
9/13/2010	11:35:26 AM	BCl3 MFC set to  0.000000
9/13/2010	11:35:26 AM	PHl3 MFC set to  0.000000
9/13/2010	11:35:26 AM	SiCl4 MFC set to  0.000000
9/13/2010	11:35:26 AM	Bypass solenoid MFC set to  0.000000
9/13/2010	11:35:27 AM	Tube furnace set to 0
9/13/2010	11:36:27 AM	H2 valve closed
9/13/2010	11:36:27 AM	BCl3 valve closed
9/13/2010	11:36:27 AM	PH3 valve closed
9/13/2010	11:36:27 AM	SiCl4 pre valve closed
9/13/2010	11:36:27 AM	SiCl4 post valve closed
9/13/2010	11:36:27 AM	Bubbler valve closed
9/13/2010	11:36:27 AM	Helium valve opened
9/13/2010	11:36:27 AM	Main Vac valve opened
9/13/2010	11:36:27 AM	Bypass valve opened
9/13/2010	11:36:27 AM	Helium MFC set to  100.000000
9/13/2010	11:36:27 AM	H2 MFC set to  0.000000
9/13/2010	11:36:27 AM	BCl3 MFC set to  0.000000
9/13/2010	11:36:27 AM	PHl3 MFC set to  0.000000
9/13/2010	11:36:27 AM	SiCl4 MFC set to  0.000000
9/13/2010	11:36:27 AM	Bypass solenoid MFC set to  0.000000
9/13/2010	11:36:27 AM	Tube furnace set to 0
9/13/2010	11:37:27 AM	Helium valve closed
9/13/2010	11:37:27 AM	H2 valve closed
9/13/2010	11:37:27 AM	BCl3 valve closed
9/13/2010	11:37:27 AM	PH3 valve closed
9/13/2010	11:37:27 AM	SiCl4 pre valve closed
9/13/2010	11:37:27 AM	SiCl4 post valve closed
9/13/2010	11:37:27 AM	Bubbler valve closed
9/13/2010	11:37:27 AM	Main Vac valve opened
9/13/2010	11:37:27 AM	Bypass valve opened
9/13/2010	11:37:27 AM	Helium MFC set to  0.000000
9/13/2010	11:37:27 AM	H2 MFC set to  0.000000
9/13/2010	11:37:27 AM	BCl3 MFC set to  0.000000
9/13/2010	11:37:27 AM	PHl3 MFC set to  0.000000
9/13/2010	11:37:27 AM	SiCl4 MFC set to  0.000000
9/13/2010	11:37:27 AM	Bypass solenoid MFC set to  0.000000
9/13/2010	11:37:27 AM	Tube furnace set to 0
9/13/2010	11:38:27 AM	H2 valve closed
9/13/2010	11:38:27 AM	BCl3 valve closed
9/13/2010	11:38:27 AM	PH3 valve closed
9/13/2010	11:38:27 AM	SiCl4 pre valve closed
9/13/2010	11:38:27 AM	SiCl4 post valve closed
9/13/2010	11:38:27 AM	Bubbler valve closed
9/13/2010	11:38:27 AM	Helium valve opened
9/13/2010	11:38:27 AM	Main Vac valve opened
9/13/2010	11:38:27 AM	Bypass valve opened
9/13/2010	11:38:27 AM	Helium MFC set to  100.000000
9/13/2010	11:38:27 AM	H2 MFC set to  0.000000
9/13/2010	11:38:27 AM	BCl3 MFC set to  0.000000
9/13/2010	11:38:27 AM	PHl3 MFC set to  0.000000
9/13/2010	11:38:27 AM	SiCl4 MFC set to  0.000000
9/13/2010	11:38:27 AM	Bypass solenoid MFC set to  0.000000
9/13/2010	11:38:27 AM	Tube furnace set to 0
9/13/2010	11:39:27 AM	Helium valve closed
9/13/2010	11:39:27 AM	H2 valve closed
9/13/2010	11:39:27 AM	BCl3 valve closed
9/13/2010	11:39:27 AM	PH3 valve closed
9/13/2010	11:39:27 AM	SiCl4 pre valve closed
9/13/2010	11:39:27 AM	SiCl4 post valve closed
9/13/2010	11:39:27 AM	Bubbler valve closed
9/13/2010	11:39:27 AM	Main Vac valve opened
9/13/2010	11:39:27 AM	Bypass valve opened
9/13/2010	11:39:27 AM	Helium MFC set to  0.000000
9/13/2010	11:39:27 AM	H2 MFC set to  0.000000
9/13/2010	11:39:27 AM	BCl3 MFC set to  0.000000
9/13/2010	11:39:27 AM	PHl3 MFC set to  0.000000
9/13/2010	11:39:27 AM	SiCl4 MFC set to  0.000000
9/13/2010	11:39:27 AM	Bypass solenoid MFC set to  0.000000
9/13/2010	11:39:27 AM	Tube furnace set to 0
9/13/2010	11:40:27 AM	H2 valve closed
9/13/2010	11:40:27 AM	BCl3 valve closed
9/13/2010	11:40:27 AM	PH3 valve closed
9/13/2010	11:40:27 AM	SiCl4 pre valve closed
9/13/2010	11:40:27 AM	SiCl4 post valve closed
9/13/2010	11:40:27 AM	Bubbler valve closed
9/13/2010	11:40:27 AM	Helium valve opened
9/13/2010	11:40:27 AM	Main Vac valve opened
9/13/2010	11:40:27 AM	Bypass valve opened
9/13/2010	11:40:27 AM	Helium MFC set to  100.000000
9/13/2010	11:40:27 AM	H2 MFC set to  0.000000
9/13/2010	11:40:27 AM	BCl3 MFC set to  0.000000
9/13/2010	11:40:27 AM	PHl3 MFC set to  0.000000
9/13/2010	11:40:27 AM	SiCl4 MFC set to  0.000000
9/13/2010	11:40:27 AM	Bypass solenoid MFC set to  0.000000
9/13/2010	11:40:28 AM	Tube furnace set to 0
9/13/2010	11:41:28 AM	Helium valve closed
9/13/2010	11:41:28 AM	H2 valve closed
9/13/2010	11:41:28 AM	BCl3 valve closed
9/13/2010	11:41:28 AM	PH3 valve closed
9/13/2010	11:41:28 AM	SiCl4 pre valve closed
9/13/2010	11:41:28 AM	SiCl4 post valve closed
9/13/2010	11:41:28 AM	Bubbler valve closed
9/13/2010	11:41:28 AM	Main Vac valve opened
9/13/2010	11:41:28 AM	Bypass valve opened
9/13/2010	11:41:28 AM	Helium MFC set to  0.000000
9/13/2010	11:41:28 AM	H2 MFC set to  0.000000
9/13/2010	11:41:28 AM	BCl3 MFC set to  0.000000
9/13/2010	11:41:28 AM	PHl3 MFC set to  0.000000
9/13/2010	11:41:28 AM	SiCl4 MFC set to  0.000000
9/13/2010	11:41:28 AM	Bypass solenoid MFC set to  0.000000
9/13/2010	11:41:28 AM	Tube furnace set to 0
9/13/2010	11:42:28 AM	H2 valve closed
9/13/2010	11:42:28 AM	BCl3 valve closed
9/13/2010	11:42:28 AM	PH3 valve closed
9/13/2010	11:42:28 AM	SiCl4 pre valve closed
9/13/2010	11:42:28 AM	SiCl4 post valve closed
9/13/2010	11:42:28 AM	Bubbler valve closed
9/13/2010	11:42:28 AM	Helium valve opened
9/13/2010	11:42:28 AM	Main Vac valve opened
9/13/2010	11:42:28 AM	Bypass valve opened
9/13/2010	11:42:28 AM	Helium MFC set to  100.000000
9/13/2010	11:42:28 AM	H2 MFC set to  0.000000
9/13/2010	11:42:28 AM	BCl3 MFC set to  0.000000
9/13/2010	11:42:28 AM	PHl3 MFC set to  0.000000
9/13/2010	11:42:28 AM	SiCl4 MFC set to  0.000000
9/13/2010	11:42:28 AM	Bypass solenoid MFC set to  0.000000
9/13/2010	11:42:28 AM	Tube furnace set to 0
9/13/2010	11:43:28 AM	Helium valve closed
9/13/2010	11:43:28 AM	H2 valve closed
9/13/2010	11:43:28 AM	BCl3 valve closed
9/13/2010	11:43:28 AM	PH3 valve closed
9/13/2010	11:43:28 AM	SiCl4 pre valve closed
9/13/2010	11:43:28 AM	SiCl4 post valve closed
9/13/2010	11:43:28 AM	Bubbler valve closed
9/13/2010	11:43:28 AM	Main Vac valve opened
9/13/2010	11:43:28 AM	Bypass valve opened
9/13/2010	11:43:28 AM	Helium MFC set to  0.000000
9/13/2010	11:43:28 AM	H2 MFC set to  0.000000
9/13/2010	11:43:28 AM	BCl3 MFC set to  0.000000
9/13/2010	11:43:28 AM	PHl3 MFC set to  0.000000
9/13/2010	11:43:28 AM	SiCl4 MFC set to  0.000000
9/13/2010	11:43:28 AM	Bypass solenoid MFC set to  0.000000
9/13/2010	11:43:28 AM	Tube furnace set to 0
9/13/2010	11:44:28 AM	H2 valve closed
9/13/2010	11:44:28 AM	BCl3 valve closed
9/13/2010	11:44:28 AM	PH3 valve closed
9/13/2010	11:44:28 AM	SiCl4 pre valve closed
9/13/2010	11:44:28 AM	SiCl4 post valve closed
9/13/2010	11:44:28 AM	Bubbler valve closed
9/13/2010	11:44:28 AM	Helium valve opened
9/13/2010	11:44:28 AM	Main Vac valve opened
9/13/2010	11:44:28 AM	Bypass valve opened
9/13/2010	11:44:28 AM	Helium MFC set to  100.000000
9/13/2010	11:44:28 AM	H2 MFC set to  0.000000
9/13/2010	11:44:28 AM	BCl3 MFC set to  0.000000
9/13/2010	11:44:28 AM	PHl3 MFC set to  0.000000
9/13/2010	11:44:28 AM	SiCl4 MFC set to  0.000000
9/13/2010	11:44:28 AM	Bypass solenoid MFC set to  0.000000
9/13/2010	11:44:29 AM	Tube furnace set to 0
9/13/2010	11:45:29 AM	Helium valve closed
9/13/2010	11:45:29 AM	H2 valve closed
9/13/2010	11:45:29 AM	BCl3 valve closed
9/13/2010	11:45:29 AM	PH3 valve closed
9/13/2010	11:45:29 AM	SiCl4 pre valve closed
9/13/2010	11:45:29 AM	SiCl4 post valve closed
9/13/2010	11:45:29 AM	Bubbler valve closed
9/13/2010	11:45:29 AM	Main Vac valve opened
9/13/2010	11:45:29 AM	Bypass valve opened
9/13/2010	11:45:29 AM	Helium MFC set to  0.000000
9/13/2010	11:45:29 AM	H2 MFC set to  0.000000
9/13/2010	11:45:29 AM	BCl3 MFC set to  0.000000
9/13/2010	11:45:29 AM	PHl3 MFC set to  0.000000
9/13/2010	11:45:29 AM	SiCl4 MFC set to  0.000000
9/13/2010	11:45:29 AM	Bypass solenoid MFC set to  0.000000
9/13/2010	11:45:29 AM	Tube furnace set to 0
9/13/2010	11:46:29 AM	H2 valve closed
9/13/2010	11:46:29 AM	BCl3 valve closed
9/13/2010	11:46:29 AM	PH3 valve closed
9/13/2010	11:46:29 AM	SiCl4 pre valve closed
9/13/2010	11:46:29 AM	SiCl4 post valve closed
9/13/2010	11:46:29 AM	Bubbler valve closed
9/13/2010	11:46:29 AM	Helium valve opened
9/13/2010	11:46:29 AM	Main Vac valve opened
9/13/2010	11:46:29 AM	Bypass valve opened
9/13/2010	11:46:29 AM	Helium MFC set to  100.000000
9/13/2010	11:46:29 AM	H2 MFC set to  0.000000
9/13/2010	11:46:29 AM	BCl3 MFC set to  0.000000
9/13/2010	11:46:29 AM	PHl3 MFC set to  0.000000
9/13/2010	11:46:29 AM	SiCl4 MFC set to  0.000000
9/13/2010	11:46:29 AM	Bypass solenoid MFC set to  0.000000
9/13/2010	11:46:29 AM	Tube furnace set to 0
9/13/2010	11:47:29 AM	Helium valve closed
9/13/2010	11:47:29 AM	H2 valve closed
9/13/2010	11:47:29 AM	BCl3 valve closed
9/13/2010	11:47:29 AM	PH3 valve closed
9/13/2010	11:47:29 AM	SiCl4 pre valve closed
9/13/2010	11:47:29 AM	SiCl4 post valve closed
9/13/2010	11:47:29 AM	Bubbler valve closed
9/13/2010	11:47:29 AM	Main Vac valve opened
9/13/2010	11:47:29 AM	Bypass valve opened
9/13/2010	11:47:29 AM	Helium MFC set to  0.000000
9/13/2010	11:47:29 AM	H2 MFC set to  0.000000
9/13/2010	11:47:29 AM	BCl3 MFC set to  0.000000
9/13/2010	11:47:29 AM	PHl3 MFC set to  0.000000
9/13/2010	11:47:29 AM	SiCl4 MFC set to  0.000000
9/13/2010	11:47:29 AM	Bypass solenoid MFC set to  0.000000
9/13/2010	11:47:29 AM	Tube furnace set to 0
9/13/2010	11:47:30 AM	Run finished at 11:47 AM
9/13/2010	11:47:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/13/2010	11:49:41 AM	Recipe started at 11:49 AM
9/13/2010	11:49:41 AM	Helium valve closed
9/13/2010	11:49:41 AM	BCl3 valve closed
9/13/2010	11:49:41 AM	PH3 valve closed
9/13/2010	11:49:41 AM	SiCl4 pre valve closed
9/13/2010	11:49:41 AM	SiCl4 post valve closed
9/13/2010	11:49:41 AM	Main Vac valve closed
9/13/2010	11:49:41 AM	Bypass valve closed
9/13/2010	11:49:41 AM	Bubbler valve closed
9/13/2010	11:49:41 AM	H2 valve opened
9/13/2010	11:49:41 AM	Helium MFC set to  0.000000
9/13/2010	11:49:41 AM	H2 MFC set to  500.000000
9/13/2010	11:49:41 AM	BCl3 MFC set to  0.000000
9/13/2010	11:49:41 AM	PHl3 MFC set to  0.000000
9/13/2010	11:49:41 AM	SiCl4 MFC set to  0.000000
9/13/2010	11:49:41 AM	Bypass solenoid MFC set to  0.000000
9/13/2010	11:49:41 AM	Tube furnace set to 0
9/13/2010	11:51:02 AM	Helium valve closed
9/13/2010	11:51:02 AM	BCl3 valve closed
9/13/2010	11:51:02 AM	PH3 valve closed
9/13/2010	11:51:02 AM	SiCl4 pre valve closed
9/13/2010	11:51:02 AM	SiCl4 post valve closed
9/13/2010	11:51:02 AM	Main Vac valve closed
9/13/2010	11:51:02 AM	Bypass valve closed
9/13/2010	11:51:02 AM	H2 valve opened
9/13/2010	11:51:02 AM	Bubbler valve opened
9/13/2010	11:51:02 AM	Helium MFC set to  0.000000
9/13/2010	11:51:02 AM	H2 MFC set to  500.000000
9/13/2010	11:51:02 AM	BCl3 MFC set to  0.000000
9/13/2010	11:51:02 AM	PHl3 MFC set to  0.000000
9/13/2010	11:51:02 AM	SiCl4 MFC set to  0.000000
9/13/2010	11:51:02 AM	Bypass solenoid MFC set to  0.000000
9/13/2010	11:51:02 AM	Tube furnace set to 1000
9/13/2010	12:11:02 PM	Helium valve closed
9/13/2010	12:11:02 PM	BCl3 valve closed
9/13/2010	12:11:02 PM	SiCl4 pre valve closed
9/13/2010	12:11:02 PM	SiCl4 post valve closed
9/13/2010	12:11:02 PM	Main Vac valve closed
9/13/2010	12:11:02 PM	Bypass valve closed
9/13/2010	12:11:02 PM	H2 valve opened
9/13/2010	12:11:02 PM	PH3 valve opened
9/13/2010	12:11:02 PM	Bubbler valve opened
9/13/2010	12:11:02 PM	Helium MFC set to  0.000000
9/13/2010	12:11:02 PM	H2 MFC set to  500.000000
9/13/2010	12:11:02 PM	BCl3 MFC set to  0.000000
9/13/2010	12:11:02 PM	PHl3 MFC set to  1.000000
9/13/2010	12:11:02 PM	SiCl4 MFC set to  0.000000
9/13/2010	12:11:02 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	12:11:02 PM	Tube furnace set to 1000
9/13/2010	12:31:02 PM	H2 valve closed
9/13/2010	12:31:02 PM	BCl3 valve closed
9/13/2010	12:31:02 PM	PH3 valve closed
9/13/2010	12:31:02 PM	SiCl4 pre valve closed
9/13/2010	12:31:02 PM	SiCl4 post valve closed
9/13/2010	12:31:02 PM	Main Vac valve closed
9/13/2010	12:31:02 PM	Bypass valve closed
9/13/2010	12:31:02 PM	Helium valve opened
9/13/2010	12:31:02 PM	Bubbler valve opened
9/13/2010	12:31:02 PM	Helium MFC set to  500.000000
9/13/2010	12:31:02 PM	H2 MFC set to  0.000000
9/13/2010	12:31:02 PM	BCl3 MFC set to  0.000000
9/13/2010	12:31:02 PM	PHl3 MFC set to  0.000000
9/13/2010	12:31:02 PM	SiCl4 MFC set to  0.000000
9/13/2010	12:31:02 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	12:31:02 PM	Tube furnace set to 0
9/13/2010	12:51:02 PM	Helium valve closed
9/13/2010	12:51:02 PM	H2 valve closed
9/13/2010	12:51:02 PM	BCl3 valve closed
9/13/2010	12:51:02 PM	PH3 valve closed
9/13/2010	12:51:02 PM	SiCl4 pre valve closed
9/13/2010	12:51:02 PM	SiCl4 post valve closed
9/13/2010	12:51:02 PM	Main Vac valve closed
9/13/2010	12:51:02 PM	Bypass valve closed
9/13/2010	12:51:02 PM	Bubbler valve closed
9/13/2010	12:51:02 PM	Helium MFC set to  0.000000
9/13/2010	12:51:02 PM	H2 MFC set to  0.000000
9/13/2010	12:51:02 PM	BCl3 MFC set to  0.000000
9/13/2010	12:51:02 PM	PHl3 MFC set to  0.000000
9/13/2010	12:51:02 PM	SiCl4 MFC set to  0.000000
9/13/2010	12:51:02 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	12:51:03 PM	Tube furnace set to 0
9/13/2010	12:51:03 PM	Run finished at 12:51 PM
9/13/2010	1:12:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/13/2010	1:12:13 PM	Recipe started at 1:12 PM
9/13/2010	1:12:13 PM	Helium valve closed
9/13/2010	1:12:13 PM	H2 valve closed
9/13/2010	1:12:13 PM	BCl3 valve closed
9/13/2010	1:12:13 PM	PH3 valve closed
9/13/2010	1:12:13 PM	SiCl4 pre valve closed
9/13/2010	1:12:13 PM	SiCl4 post valve closed
9/13/2010	1:12:13 PM	Main Vac valve closed
9/13/2010	1:12:13 PM	Bubbler valve closed
9/13/2010	1:12:13 PM	Bypass valve opened
9/13/2010	1:12:13 PM	Helium MFC set to  0.000000
9/13/2010	1:12:13 PM	H2 MFC set to  0.000000
9/13/2010	1:12:13 PM	BCl3 MFC set to  0.000000
9/13/2010	1:12:13 PM	PHl3 MFC set to  0.000000
9/13/2010	1:12:13 PM	SiCl4 MFC set to  0.000000
9/13/2010	1:12:13 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	1:12:13 PM	Tube furnace set to 0
9/13/2010	1:12:53 PM	Helium valve closed
9/13/2010	1:12:53 PM	H2 valve closed
9/13/2010	1:12:53 PM	BCl3 valve closed
9/13/2010	1:12:53 PM	PH3 valve closed
9/13/2010	1:12:53 PM	SiCl4 pre valve closed
9/13/2010	1:12:53 PM	SiCl4 post valve closed
9/13/2010	1:12:53 PM	Bubbler valve closed
9/13/2010	1:12:53 PM	Main Vac valve opened
9/13/2010	1:12:53 PM	Bypass valve opened
9/13/2010	1:12:53 PM	Helium MFC set to  0.000000
9/13/2010	1:12:53 PM	H2 MFC set to  0.000000
9/13/2010	1:12:53 PM	BCl3 MFC set to  0.000000
9/13/2010	1:12:53 PM	PHl3 MFC set to  0.000000
9/13/2010	1:12:53 PM	SiCl4 MFC set to  0.000000
9/13/2010	1:12:53 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	1:12:53 PM	Tube furnace set to 0
9/13/2010	1:12:53 PM	Run finished at 1:12 PM
9/13/2010	1:12:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/13/2010	1:13:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/13/2010	1:14:09 PM	Recipe started at 1:14 PM
9/13/2010	1:14:09 PM	Helium valve closed
9/13/2010	1:14:09 PM	H2 valve closed
9/13/2010	1:14:09 PM	BCl3 valve closed
9/13/2010	1:14:09 PM	PH3 valve closed
9/13/2010	1:14:09 PM	SiCl4 pre valve closed
9/13/2010	1:14:09 PM	SiCl4 post valve closed
9/13/2010	1:14:09 PM	Main Vac valve closed
9/13/2010	1:14:09 PM	Bubbler valve closed
9/13/2010	1:14:09 PM	Bypass valve opened
9/13/2010	1:14:09 PM	Helium MFC set to  0.000000
9/13/2010	1:14:09 PM	H2 MFC set to  0.000000
9/13/2010	1:14:09 PM	BCl3 MFC set to  0.000000
9/13/2010	1:14:09 PM	PHl3 MFC set to  0.000000
9/13/2010	1:14:09 PM	SiCl4 MFC set to  0.000000
9/13/2010	1:14:09 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	1:14:09 PM	Tube furnace set to 0
9/13/2010	1:14:09 PM	Helium valve closed
9/13/2010	1:14:09 PM	H2 valve closed
9/13/2010	1:14:09 PM	BCl3 valve closed
9/13/2010	1:14:09 PM	PH3 valve closed
9/13/2010	1:14:09 PM	SiCl4 pre valve closed
9/13/2010	1:14:09 PM	SiCl4 post valve closed
9/13/2010	1:14:09 PM	Bubbler valve closed
9/13/2010	1:14:09 PM	Main Vac valve opened
9/13/2010	1:14:09 PM	Bypass valve opened
9/13/2010	1:14:09 PM	Helium MFC set to  0.000000
9/13/2010	1:14:09 PM	H2 MFC set to  0.000000
9/13/2010	1:14:09 PM	BCl3 MFC set to  0.000000
9/13/2010	1:14:09 PM	PHl3 MFC set to  0.000000
9/13/2010	1:14:09 PM	SiCl4 MFC set to  0.000000
9/13/2010	1:14:09 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	1:14:09 PM	Tube furnace set to 0
9/13/2010	1:15:09 PM	H2 valve closed
9/13/2010	1:15:09 PM	BCl3 valve closed
9/13/2010	1:15:09 PM	PH3 valve closed
9/13/2010	1:15:09 PM	SiCl4 pre valve closed
9/13/2010	1:15:09 PM	SiCl4 post valve closed
9/13/2010	1:15:09 PM	Bubbler valve closed
9/13/2010	1:15:10 PM	Helium valve opened
9/13/2010	1:15:10 PM	Main Vac valve opened
9/13/2010	1:15:10 PM	Bypass valve opened
9/13/2010	1:15:10 PM	Helium MFC set to  100.000000
9/13/2010	1:15:10 PM	H2 MFC set to  0.000000
9/13/2010	1:15:10 PM	BCl3 MFC set to  0.000000
9/13/2010	1:15:10 PM	PHl3 MFC set to  0.000000
9/13/2010	1:15:10 PM	SiCl4 MFC set to  0.000000
9/13/2010	1:15:10 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	1:15:10 PM	Tube furnace set to 0
9/13/2010	1:16:10 PM	Helium valve closed
9/13/2010	1:16:10 PM	H2 valve closed
9/13/2010	1:16:10 PM	BCl3 valve closed
9/13/2010	1:16:10 PM	PH3 valve closed
9/13/2010	1:16:10 PM	SiCl4 pre valve closed
9/13/2010	1:16:10 PM	SiCl4 post valve closed
9/13/2010	1:16:10 PM	Bubbler valve closed
9/13/2010	1:16:10 PM	Main Vac valve opened
9/13/2010	1:16:10 PM	Bypass valve opened
9/13/2010	1:16:10 PM	Helium MFC set to  0.000000
9/13/2010	1:16:10 PM	H2 MFC set to  0.000000
9/13/2010	1:16:10 PM	BCl3 MFC set to  0.000000
9/13/2010	1:16:10 PM	PHl3 MFC set to  0.000000
9/13/2010	1:16:10 PM	SiCl4 MFC set to  0.000000
9/13/2010	1:16:10 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	1:16:10 PM	Tube furnace set to 0
9/13/2010	1:17:10 PM	H2 valve closed
9/13/2010	1:17:10 PM	BCl3 valve closed
9/13/2010	1:17:10 PM	PH3 valve closed
9/13/2010	1:17:10 PM	SiCl4 pre valve closed
9/13/2010	1:17:10 PM	SiCl4 post valve closed
9/13/2010	1:17:10 PM	Bubbler valve closed
9/13/2010	1:17:10 PM	Helium valve opened
9/13/2010	1:17:10 PM	Main Vac valve opened
9/13/2010	1:17:10 PM	Bypass valve opened
9/13/2010	1:17:10 PM	Helium MFC set to  100.000000
9/13/2010	1:17:10 PM	H2 MFC set to  0.000000
9/13/2010	1:17:10 PM	BCl3 MFC set to  0.000000
9/13/2010	1:17:10 PM	PHl3 MFC set to  0.000000
9/13/2010	1:17:10 PM	SiCl4 MFC set to  0.000000
9/13/2010	1:17:10 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	1:17:10 PM	Tube furnace set to 0
9/13/2010	1:18:10 PM	Helium valve closed
9/13/2010	1:18:10 PM	H2 valve closed
9/13/2010	1:18:10 PM	BCl3 valve closed
9/13/2010	1:18:10 PM	PH3 valve closed
9/13/2010	1:18:10 PM	SiCl4 pre valve closed
9/13/2010	1:18:10 PM	SiCl4 post valve closed
9/13/2010	1:18:10 PM	Bubbler valve closed
9/13/2010	1:18:10 PM	Main Vac valve opened
9/13/2010	1:18:10 PM	Bypass valve opened
9/13/2010	1:18:10 PM	Helium MFC set to  0.000000
9/13/2010	1:18:10 PM	H2 MFC set to  0.000000
9/13/2010	1:18:10 PM	BCl3 MFC set to  0.000000
9/13/2010	1:18:10 PM	PHl3 MFC set to  0.000000
9/13/2010	1:18:10 PM	SiCl4 MFC set to  0.000000
9/13/2010	1:18:10 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	1:18:10 PM	Tube furnace set to 0
9/13/2010	1:19:10 PM	H2 valve closed
9/13/2010	1:19:10 PM	BCl3 valve closed
9/13/2010	1:19:10 PM	PH3 valve closed
9/13/2010	1:19:10 PM	SiCl4 pre valve closed
9/13/2010	1:19:10 PM	SiCl4 post valve closed
9/13/2010	1:19:10 PM	Bubbler valve closed
9/13/2010	1:19:10 PM	Helium valve opened
9/13/2010	1:19:10 PM	Main Vac valve opened
9/13/2010	1:19:10 PM	Bypass valve opened
9/13/2010	1:19:10 PM	Helium MFC set to  100.000000
9/13/2010	1:19:10 PM	H2 MFC set to  0.000000
9/13/2010	1:19:10 PM	BCl3 MFC set to  0.000000
9/13/2010	1:19:10 PM	PHl3 MFC set to  0.000000
9/13/2010	1:19:10 PM	SiCl4 MFC set to  0.000000
9/13/2010	1:19:10 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	1:19:11 PM	Tube furnace set to 0
9/13/2010	1:20:11 PM	Helium valve closed
9/13/2010	1:20:11 PM	H2 valve closed
9/13/2010	1:20:11 PM	BCl3 valve closed
9/13/2010	1:20:11 PM	PH3 valve closed
9/13/2010	1:20:11 PM	SiCl4 pre valve closed
9/13/2010	1:20:11 PM	SiCl4 post valve closed
9/13/2010	1:20:11 PM	Bubbler valve closed
9/13/2010	1:20:11 PM	Main Vac valve opened
9/13/2010	1:20:11 PM	Bypass valve opened
9/13/2010	1:20:11 PM	Helium MFC set to  0.000000
9/13/2010	1:20:11 PM	H2 MFC set to  0.000000
9/13/2010	1:20:11 PM	BCl3 MFC set to  0.000000
9/13/2010	1:20:11 PM	PHl3 MFC set to  0.000000
9/13/2010	1:20:11 PM	SiCl4 MFC set to  0.000000
9/13/2010	1:20:11 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	1:20:11 PM	Tube furnace set to 0
9/13/2010	1:21:11 PM	H2 valve closed
9/13/2010	1:21:11 PM	BCl3 valve closed
9/13/2010	1:21:11 PM	PH3 valve closed
9/13/2010	1:21:11 PM	SiCl4 pre valve closed
9/13/2010	1:21:11 PM	SiCl4 post valve closed
9/13/2010	1:21:11 PM	Bubbler valve closed
9/13/2010	1:21:11 PM	Helium valve opened
9/13/2010	1:21:11 PM	Main Vac valve opened
9/13/2010	1:21:11 PM	Bypass valve opened
9/13/2010	1:21:11 PM	Helium MFC set to  100.000000
9/13/2010	1:21:11 PM	H2 MFC set to  0.000000
9/13/2010	1:21:11 PM	BCl3 MFC set to  0.000000
9/13/2010	1:21:11 PM	PHl3 MFC set to  0.000000
9/13/2010	1:21:11 PM	SiCl4 MFC set to  0.000000
9/13/2010	1:21:11 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	1:21:11 PM	Tube furnace set to 0
9/13/2010	1:22:11 PM	Helium valve closed
9/13/2010	1:22:11 PM	H2 valve closed
9/13/2010	1:22:11 PM	BCl3 valve closed
9/13/2010	1:22:11 PM	PH3 valve closed
9/13/2010	1:22:11 PM	SiCl4 pre valve closed
9/13/2010	1:22:11 PM	SiCl4 post valve closed
9/13/2010	1:22:11 PM	Bubbler valve closed
9/13/2010	1:22:11 PM	Main Vac valve opened
9/13/2010	1:22:11 PM	Bypass valve opened
9/13/2010	1:22:11 PM	Helium MFC set to  0.000000
9/13/2010	1:22:11 PM	H2 MFC set to  0.000000
9/13/2010	1:22:11 PM	BCl3 MFC set to  0.000000
9/13/2010	1:22:11 PM	PHl3 MFC set to  0.000000
9/13/2010	1:22:11 PM	SiCl4 MFC set to  0.000000
9/13/2010	1:22:11 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	1:22:11 PM	Tube furnace set to 0
9/13/2010	1:23:11 PM	H2 valve closed
9/13/2010	1:23:11 PM	BCl3 valve closed
9/13/2010	1:23:11 PM	PH3 valve closed
9/13/2010	1:23:11 PM	SiCl4 pre valve closed
9/13/2010	1:23:11 PM	SiCl4 post valve closed
9/13/2010	1:23:11 PM	Bubbler valve closed
9/13/2010	1:23:11 PM	Helium valve opened
9/13/2010	1:23:11 PM	Main Vac valve opened
9/13/2010	1:23:11 PM	Bypass valve opened
9/13/2010	1:23:11 PM	Helium MFC set to  100.000000
9/13/2010	1:23:11 PM	H2 MFC set to  0.000000
9/13/2010	1:23:11 PM	BCl3 MFC set to  0.000000
9/13/2010	1:23:11 PM	PHl3 MFC set to  0.000000
9/13/2010	1:23:11 PM	SiCl4 MFC set to  0.000000
9/13/2010	1:23:11 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	1:23:11 PM	Tube furnace set to 0
9/13/2010	1:24:11 PM	Helium valve closed
9/13/2010	1:24:12 PM	H2 valve closed
9/13/2010	1:24:12 PM	BCl3 valve closed
9/13/2010	1:24:12 PM	PH3 valve closed
9/13/2010	1:24:12 PM	SiCl4 pre valve closed
9/13/2010	1:24:12 PM	SiCl4 post valve closed
9/13/2010	1:24:12 PM	Bubbler valve closed
9/13/2010	1:24:12 PM	Main Vac valve opened
9/13/2010	1:24:12 PM	Bypass valve opened
9/13/2010	1:24:12 PM	Helium MFC set to  0.000000
9/13/2010	1:24:12 PM	H2 MFC set to  0.000000
9/13/2010	1:24:12 PM	BCl3 MFC set to  0.000000
9/13/2010	1:24:12 PM	PHl3 MFC set to  0.000000
9/13/2010	1:24:12 PM	SiCl4 MFC set to  0.000000
9/13/2010	1:24:12 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	1:24:12 PM	Tube furnace set to 0
9/13/2010	1:25:12 PM	H2 valve closed
9/13/2010	1:25:12 PM	BCl3 valve closed
9/13/2010	1:25:12 PM	PH3 valve closed
9/13/2010	1:25:12 PM	SiCl4 pre valve closed
9/13/2010	1:25:12 PM	SiCl4 post valve closed
9/13/2010	1:25:12 PM	Bubbler valve closed
9/13/2010	1:25:12 PM	Helium valve opened
9/13/2010	1:25:12 PM	Main Vac valve opened
9/13/2010	1:25:12 PM	Bypass valve opened
9/13/2010	1:25:12 PM	Helium MFC set to  100.000000
9/13/2010	1:25:12 PM	H2 MFC set to  0.000000
9/13/2010	1:25:12 PM	BCl3 MFC set to  0.000000
9/13/2010	1:25:12 PM	PHl3 MFC set to  0.000000
9/13/2010	1:25:12 PM	SiCl4 MFC set to  0.000000
9/13/2010	1:25:12 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	1:25:12 PM	Tube furnace set to 0
9/13/2010	1:26:12 PM	Helium valve closed
9/13/2010	1:26:12 PM	H2 valve closed
9/13/2010	1:26:12 PM	BCl3 valve closed
9/13/2010	1:26:12 PM	PH3 valve closed
9/13/2010	1:26:12 PM	SiCl4 pre valve closed
9/13/2010	1:26:12 PM	SiCl4 post valve closed
9/13/2010	1:26:12 PM	Bubbler valve closed
9/13/2010	1:26:12 PM	Main Vac valve opened
9/13/2010	1:26:12 PM	Bypass valve opened
9/13/2010	1:26:12 PM	Helium MFC set to  0.000000
9/13/2010	1:26:12 PM	H2 MFC set to  0.000000
9/13/2010	1:26:12 PM	BCl3 MFC set to  0.000000
9/13/2010	1:26:12 PM	PHl3 MFC set to  0.000000
9/13/2010	1:26:12 PM	SiCl4 MFC set to  0.000000
9/13/2010	1:26:12 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	1:26:12 PM	Tube furnace set to 0
9/13/2010	1:27:12 PM	H2 valve closed
9/13/2010	1:27:12 PM	BCl3 valve closed
9/13/2010	1:27:12 PM	PH3 valve closed
9/13/2010	1:27:12 PM	SiCl4 pre valve closed
9/13/2010	1:27:12 PM	SiCl4 post valve closed
9/13/2010	1:27:12 PM	Bubbler valve closed
9/13/2010	1:27:12 PM	Helium valve opened
9/13/2010	1:27:12 PM	Main Vac valve opened
9/13/2010	1:27:12 PM	Bypass valve opened
9/13/2010	1:27:12 PM	Helium MFC set to  100.000000
9/13/2010	1:27:12 PM	H2 MFC set to  0.000000
9/13/2010	1:27:12 PM	BCl3 MFC set to  0.000000
9/13/2010	1:27:12 PM	PHl3 MFC set to  0.000000
9/13/2010	1:27:12 PM	SiCl4 MFC set to  0.000000
9/13/2010	1:27:12 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	1:27:12 PM	Tube furnace set to 0
9/13/2010	1:28:12 PM	Helium valve closed
9/13/2010	1:28:12 PM	H2 valve closed
9/13/2010	1:28:12 PM	BCl3 valve closed
9/13/2010	1:28:12 PM	PH3 valve closed
9/13/2010	1:28:12 PM	SiCl4 pre valve closed
9/13/2010	1:28:12 PM	SiCl4 post valve closed
9/13/2010	1:28:12 PM	Bubbler valve closed
9/13/2010	1:28:12 PM	Main Vac valve opened
9/13/2010	1:28:12 PM	Bypass valve opened
9/13/2010	1:28:12 PM	Helium MFC set to  0.000000
9/13/2010	1:28:12 PM	H2 MFC set to  0.000000
9/13/2010	1:28:12 PM	BCl3 MFC set to  0.000000
9/13/2010	1:28:12 PM	PHl3 MFC set to  0.000000
9/13/2010	1:28:12 PM	SiCl4 MFC set to  0.000000
9/13/2010	1:28:12 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	1:28:12 PM	Tube furnace set to 0
9/13/2010	1:29:13 PM	H2 valve closed
9/13/2010	1:29:13 PM	BCl3 valve closed
9/13/2010	1:29:13 PM	PH3 valve closed
9/13/2010	1:29:13 PM	SiCl4 pre valve closed
9/13/2010	1:29:13 PM	SiCl4 post valve closed
9/13/2010	1:29:13 PM	Bubbler valve closed
9/13/2010	1:29:13 PM	Helium valve opened
9/13/2010	1:29:13 PM	Main Vac valve opened
9/13/2010	1:29:13 PM	Bypass valve opened
9/13/2010	1:29:13 PM	Helium MFC set to  100.000000
9/13/2010	1:29:13 PM	H2 MFC set to  0.000000
9/13/2010	1:29:13 PM	BCl3 MFC set to  0.000000
9/13/2010	1:29:13 PM	PHl3 MFC set to  0.000000
9/13/2010	1:29:13 PM	SiCl4 MFC set to  0.000000
9/13/2010	1:29:13 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	1:29:13 PM	Tube furnace set to 0
9/13/2010	1:30:13 PM	Helium valve closed
9/13/2010	1:30:13 PM	H2 valve closed
9/13/2010	1:30:13 PM	BCl3 valve closed
9/13/2010	1:30:13 PM	PH3 valve closed
9/13/2010	1:30:13 PM	SiCl4 pre valve closed
9/13/2010	1:30:13 PM	SiCl4 post valve closed
9/13/2010	1:30:13 PM	Bubbler valve closed
9/13/2010	1:30:13 PM	Main Vac valve opened
9/13/2010	1:30:13 PM	Bypass valve opened
9/13/2010	1:30:13 PM	Helium MFC set to  0.000000
9/13/2010	1:30:13 PM	H2 MFC set to  0.000000
9/13/2010	1:30:13 PM	BCl3 MFC set to  0.000000
9/13/2010	1:30:13 PM	PHl3 MFC set to  0.000000
9/13/2010	1:30:13 PM	SiCl4 MFC set to  0.000000
9/13/2010	1:30:13 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	1:30:13 PM	Tube furnace set to 0
9/13/2010	1:31:13 PM	H2 valve closed
9/13/2010	1:31:13 PM	BCl3 valve closed
9/13/2010	1:31:13 PM	PH3 valve closed
9/13/2010	1:31:13 PM	SiCl4 pre valve closed
9/13/2010	1:31:13 PM	SiCl4 post valve closed
9/13/2010	1:31:13 PM	Bubbler valve closed
9/13/2010	1:31:13 PM	Helium valve opened
9/13/2010	1:31:13 PM	Main Vac valve opened
9/13/2010	1:31:13 PM	Bypass valve opened
9/13/2010	1:31:13 PM	Helium MFC set to  100.000000
9/13/2010	1:31:13 PM	H2 MFC set to  0.000000
9/13/2010	1:31:13 PM	BCl3 MFC set to  0.000000
9/13/2010	1:31:13 PM	PHl3 MFC set to  0.000000
9/13/2010	1:31:13 PM	SiCl4 MFC set to  0.000000
9/13/2010	1:31:13 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	1:31:13 PM	Tube furnace set to 0
9/13/2010	1:32:13 PM	Helium valve closed
9/13/2010	1:32:13 PM	H2 valve closed
9/13/2010	1:32:13 PM	BCl3 valve closed
9/13/2010	1:32:13 PM	PH3 valve closed
9/13/2010	1:32:13 PM	SiCl4 pre valve closed
9/13/2010	1:32:13 PM	SiCl4 post valve closed
9/13/2010	1:32:13 PM	Bubbler valve closed
9/13/2010	1:32:13 PM	Main Vac valve opened
9/13/2010	1:32:13 PM	Bypass valve opened
9/13/2010	1:32:13 PM	Helium MFC set to  0.000000
9/13/2010	1:32:13 PM	H2 MFC set to  0.000000
9/13/2010	1:32:13 PM	BCl3 MFC set to  0.000000
9/13/2010	1:32:13 PM	PHl3 MFC set to  0.000000
9/13/2010	1:32:13 PM	SiCl4 MFC set to  0.000000
9/13/2010	1:32:13 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	1:32:13 PM	Tube furnace set to 0
9/13/2010	1:33:13 PM	H2 valve closed
9/13/2010	1:33:13 PM	BCl3 valve closed
9/13/2010	1:33:13 PM	PH3 valve closed
9/13/2010	1:33:13 PM	SiCl4 pre valve closed
9/13/2010	1:33:13 PM	SiCl4 post valve closed
9/13/2010	1:33:13 PM	Bubbler valve closed
9/13/2010	1:33:13 PM	Helium valve opened
9/13/2010	1:33:13 PM	Main Vac valve opened
9/13/2010	1:33:13 PM	Bypass valve opened
9/13/2010	1:33:13 PM	Helium MFC set to  100.000000
9/13/2010	1:33:13 PM	H2 MFC set to  0.000000
9/13/2010	1:33:13 PM	BCl3 MFC set to  0.000000
9/13/2010	1:33:13 PM	PHl3 MFC set to  0.000000
9/13/2010	1:33:13 PM	SiCl4 MFC set to  0.000000
9/13/2010	1:33:13 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	1:33:13 PM	Tube furnace set to 0
9/13/2010	1:34:14 PM	Helium valve closed
9/13/2010	1:34:14 PM	H2 valve closed
9/13/2010	1:34:14 PM	BCl3 valve closed
9/13/2010	1:34:14 PM	PH3 valve closed
9/13/2010	1:34:14 PM	SiCl4 pre valve closed
9/13/2010	1:34:14 PM	SiCl4 post valve closed
9/13/2010	1:34:14 PM	Bubbler valve closed
9/13/2010	1:34:14 PM	Main Vac valve opened
9/13/2010	1:34:14 PM	Bypass valve opened
9/13/2010	1:34:14 PM	Helium MFC set to  0.000000
9/13/2010	1:34:14 PM	H2 MFC set to  0.000000
9/13/2010	1:34:14 PM	BCl3 MFC set to  0.000000
9/13/2010	1:34:14 PM	PHl3 MFC set to  0.000000
9/13/2010	1:34:14 PM	SiCl4 MFC set to  0.000000
9/13/2010	1:34:14 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	1:34:14 PM	Tube furnace set to 0
9/13/2010	1:34:15 PM	Run finished at 1:34 PM
9/13/2010	1:34:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/13/2010	1:39:17 PM	Recipe started at 1:39 PM
9/13/2010	1:39:17 PM	Helium valve closed
9/13/2010	1:39:17 PM	BCl3 valve closed
9/13/2010	1:39:17 PM	PH3 valve closed
9/13/2010	1:39:17 PM	SiCl4 pre valve closed
9/13/2010	1:39:17 PM	SiCl4 post valve closed
9/13/2010	1:39:17 PM	Main Vac valve closed
9/13/2010	1:39:17 PM	Bypass valve closed
9/13/2010	1:39:17 PM	Bubbler valve closed
9/13/2010	1:39:17 PM	H2 valve opened
9/13/2010	1:39:17 PM	Helium MFC set to  0.000000
9/13/2010	1:39:17 PM	H2 MFC set to  500.000000
9/13/2010	1:39:17 PM	BCl3 MFC set to  0.000000
9/13/2010	1:39:17 PM	PHl3 MFC set to  0.000000
9/13/2010	1:39:17 PM	SiCl4 MFC set to  0.000000
9/13/2010	1:39:17 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	1:39:17 PM	Tube furnace set to 0
9/13/2010	1:40:36 PM	Helium valve closed
9/13/2010	1:40:36 PM	BCl3 valve closed
9/13/2010	1:40:36 PM	PH3 valve closed
9/13/2010	1:40:36 PM	SiCl4 pre valve closed
9/13/2010	1:40:36 PM	SiCl4 post valve closed
9/13/2010	1:40:36 PM	Main Vac valve closed
9/13/2010	1:40:36 PM	Bypass valve closed
9/13/2010	1:40:36 PM	H2 valve opened
9/13/2010	1:40:36 PM	Bubbler valve opened
9/13/2010	1:40:36 PM	Helium MFC set to  0.000000
9/13/2010	1:40:36 PM	H2 MFC set to  500.000000
9/13/2010	1:40:36 PM	BCl3 MFC set to  0.000000
9/13/2010	1:40:36 PM	PHl3 MFC set to  0.000000
9/13/2010	1:40:36 PM	SiCl4 MFC set to  0.000000
9/13/2010	1:40:36 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	1:40:37 PM	Tube furnace set to 1040
9/13/2010	2:05:37 PM	Helium valve closed
9/13/2010	2:05:37 PM	BCl3 valve closed
9/13/2010	2:05:37 PM	Main Vac valve closed
9/13/2010	2:05:37 PM	Bypass valve closed
9/13/2010	2:05:37 PM	H2 valve opened
9/13/2010	2:05:37 PM	PH3 valve opened
9/13/2010	2:05:37 PM	SiCl4 pre valve opened
9/13/2010	2:05:37 PM	SiCl4 post valve opened
9/13/2010	2:05:37 PM	Bubbler valve opened
9/13/2010	2:05:37 PM	Helium MFC set to  0.000000
9/13/2010	2:05:37 PM	H2 MFC set to  500.000000
9/13/2010	2:05:37 PM	BCl3 MFC set to  0.000000
9/13/2010	2:05:37 PM	PHl3 MFC set to  1.000000
9/13/2010	2:05:37 PM	SiCl4 MFC set to  50.000000
9/13/2010	2:05:37 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	2:05:37 PM	Tube furnace set to 1040
9/13/2010	2:25:37 PM	H2 valve closed
9/13/2010	2:25:37 PM	BCl3 valve closed
9/13/2010	2:25:37 PM	PH3 valve closed
9/13/2010	2:25:37 PM	SiCl4 pre valve closed
9/13/2010	2:25:37 PM	SiCl4 post valve closed
9/13/2010	2:25:37 PM	Main Vac valve closed
9/13/2010	2:25:37 PM	Bypass valve closed
9/13/2010	2:25:37 PM	Helium valve opened
9/13/2010	2:25:37 PM	Bubbler valve opened
9/13/2010	2:25:37 PM	Helium MFC set to  500.000000
9/13/2010	2:25:37 PM	H2 MFC set to  0.000000
9/13/2010	2:25:37 PM	BCl3 MFC set to  0.000000
9/13/2010	2:25:37 PM	PHl3 MFC set to  0.000000
9/13/2010	2:25:37 PM	SiCl4 MFC set to  0.000000
9/13/2010	2:25:37 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	2:25:37 PM	Tube furnace set to 0
9/13/2010	2:45:37 PM	Helium valve closed
9/13/2010	2:45:37 PM	H2 valve closed
9/13/2010	2:45:37 PM	BCl3 valve closed
9/13/2010	2:45:37 PM	PH3 valve closed
9/13/2010	2:45:37 PM	SiCl4 pre valve closed
9/13/2010	2:45:37 PM	SiCl4 post valve closed
9/13/2010	2:45:37 PM	Main Vac valve closed
9/13/2010	2:45:37 PM	Bypass valve closed
9/13/2010	2:45:37 PM	Bubbler valve closed
9/13/2010	2:45:37 PM	Helium MFC set to  0.000000
9/13/2010	2:45:37 PM	H2 MFC set to  0.000000
9/13/2010	2:45:37 PM	BCl3 MFC set to  0.000000
9/13/2010	2:45:37 PM	PHl3 MFC set to  0.000000
9/13/2010	2:45:37 PM	SiCl4 MFC set to  0.000000
9/13/2010	2:45:37 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	2:45:37 PM	Tube furnace set to 0
9/13/2010	2:45:37 PM	Run finished at 2:45 PM
9/13/2010	2:54:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/13/2010	2:54:43 PM	Recipe started at 2:54 PM
9/13/2010	2:54:43 PM	Helium valve closed
9/13/2010	2:54:43 PM	H2 valve closed
9/13/2010	2:54:43 PM	BCl3 valve closed
9/13/2010	2:54:43 PM	PH3 valve closed
9/13/2010	2:54:43 PM	SiCl4 pre valve closed
9/13/2010	2:54:43 PM	SiCl4 post valve closed
9/13/2010	2:54:43 PM	Main Vac valve closed
9/13/2010	2:54:43 PM	Bubbler valve closed
9/13/2010	2:54:43 PM	Bypass valve opened
9/13/2010	2:54:43 PM	Helium MFC set to  0.000000
9/13/2010	2:54:43 PM	H2 MFC set to  0.000000
9/13/2010	2:54:43 PM	BCl3 MFC set to  0.000000
9/13/2010	2:54:43 PM	PHl3 MFC set to  0.000000
9/13/2010	2:54:43 PM	SiCl4 MFC set to  0.000000
9/13/2010	2:54:43 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	2:54:43 PM	Tube furnace set to 0
9/13/2010	2:55:24 PM	Helium valve closed
9/13/2010	2:55:24 PM	H2 valve closed
9/13/2010	2:55:24 PM	BCl3 valve closed
9/13/2010	2:55:24 PM	PH3 valve closed
9/13/2010	2:55:24 PM	SiCl4 pre valve closed
9/13/2010	2:55:24 PM	SiCl4 post valve closed
9/13/2010	2:55:24 PM	Bubbler valve closed
9/13/2010	2:55:24 PM	Main Vac valve opened
9/13/2010	2:55:24 PM	Bypass valve opened
9/13/2010	2:55:24 PM	Helium MFC set to  0.000000
9/13/2010	2:55:24 PM	H2 MFC set to  0.000000
9/13/2010	2:55:24 PM	BCl3 MFC set to  0.000000
9/13/2010	2:55:24 PM	PHl3 MFC set to  0.000000
9/13/2010	2:55:24 PM	SiCl4 MFC set to  0.000000
9/13/2010	2:55:24 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	2:55:24 PM	Tube furnace set to 0
9/13/2010	2:55:24 PM	Run finished at 2:55 PM
9/13/2010	2:55:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/13/2010	2:55:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/13/2010	2:55:57 PM	Recipe started at 2:55 PM
9/13/2010	2:55:57 PM	Helium valve closed
9/13/2010	2:55:57 PM	H2 valve closed
9/13/2010	2:55:57 PM	BCl3 valve closed
9/13/2010	2:55:57 PM	PH3 valve closed
9/13/2010	2:55:57 PM	SiCl4 pre valve closed
9/13/2010	2:55:57 PM	SiCl4 post valve closed
9/13/2010	2:55:57 PM	Main Vac valve closed
9/13/2010	2:55:57 PM	Bubbler valve closed
9/13/2010	2:55:57 PM	Bypass valve opened
9/13/2010	2:55:57 PM	Helium MFC set to  0.000000
9/13/2010	2:55:57 PM	H2 MFC set to  0.000000
9/13/2010	2:55:57 PM	BCl3 MFC set to  0.000000
9/13/2010	2:55:57 PM	PHl3 MFC set to  0.000000
9/13/2010	2:55:57 PM	SiCl4 MFC set to  0.000000
9/13/2010	2:55:57 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	2:55:57 PM	Tube furnace set to 0
9/13/2010	2:55:58 PM	Helium valve closed
9/13/2010	2:55:58 PM	H2 valve closed
9/13/2010	2:55:58 PM	BCl3 valve closed
9/13/2010	2:55:58 PM	PH3 valve closed
9/13/2010	2:55:58 PM	SiCl4 pre valve closed
9/13/2010	2:55:58 PM	SiCl4 post valve closed
9/13/2010	2:55:58 PM	Bubbler valve closed
9/13/2010	2:55:58 PM	Main Vac valve opened
9/13/2010	2:55:58 PM	Bypass valve opened
9/13/2010	2:55:58 PM	Helium MFC set to  0.000000
9/13/2010	2:55:58 PM	H2 MFC set to  0.000000
9/13/2010	2:55:58 PM	BCl3 MFC set to  0.000000
9/13/2010	2:55:58 PM	PHl3 MFC set to  0.000000
9/13/2010	2:55:58 PM	SiCl4 MFC set to  0.000000
9/13/2010	2:55:58 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	2:55:58 PM	Tube furnace set to 0
9/13/2010	2:56:58 PM	H2 valve closed
9/13/2010	2:56:58 PM	BCl3 valve closed
9/13/2010	2:56:58 PM	PH3 valve closed
9/13/2010	2:56:58 PM	SiCl4 pre valve closed
9/13/2010	2:56:58 PM	SiCl4 post valve closed
9/13/2010	2:56:58 PM	Bubbler valve closed
9/13/2010	2:56:58 PM	Helium valve opened
9/13/2010	2:56:58 PM	Main Vac valve opened
9/13/2010	2:56:58 PM	Bypass valve opened
9/13/2010	2:56:58 PM	Helium MFC set to  100.000000
9/13/2010	2:56:58 PM	H2 MFC set to  0.000000
9/13/2010	2:56:58 PM	BCl3 MFC set to  0.000000
9/13/2010	2:56:58 PM	PHl3 MFC set to  0.000000
9/13/2010	2:56:58 PM	SiCl4 MFC set to  0.000000
9/13/2010	2:56:58 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	2:56:58 PM	Tube furnace set to 0
9/13/2010	2:57:58 PM	Helium valve closed
9/13/2010	2:57:58 PM	H2 valve closed
9/13/2010	2:57:58 PM	BCl3 valve closed
9/13/2010	2:57:58 PM	PH3 valve closed
9/13/2010	2:57:58 PM	SiCl4 pre valve closed
9/13/2010	2:57:58 PM	SiCl4 post valve closed
9/13/2010	2:57:58 PM	Bubbler valve closed
9/13/2010	2:57:58 PM	Main Vac valve opened
9/13/2010	2:57:58 PM	Bypass valve opened
9/13/2010	2:57:58 PM	Helium MFC set to  0.000000
9/13/2010	2:57:58 PM	H2 MFC set to  0.000000
9/13/2010	2:57:58 PM	BCl3 MFC set to  0.000000
9/13/2010	2:57:58 PM	PHl3 MFC set to  0.000000
9/13/2010	2:57:58 PM	SiCl4 MFC set to  0.000000
9/13/2010	2:57:58 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	2:57:58 PM	Tube furnace set to 0
9/13/2010	2:58:58 PM	H2 valve closed
9/13/2010	2:58:58 PM	BCl3 valve closed
9/13/2010	2:58:58 PM	PH3 valve closed
9/13/2010	2:58:58 PM	SiCl4 pre valve closed
9/13/2010	2:58:58 PM	SiCl4 post valve closed
9/13/2010	2:58:58 PM	Bubbler valve closed
9/13/2010	2:58:58 PM	Helium valve opened
9/13/2010	2:58:58 PM	Main Vac valve opened
9/13/2010	2:58:58 PM	Bypass valve opened
9/13/2010	2:58:58 PM	Helium MFC set to  100.000000
9/13/2010	2:58:58 PM	H2 MFC set to  0.000000
9/13/2010	2:58:58 PM	BCl3 MFC set to  0.000000
9/13/2010	2:58:58 PM	PHl3 MFC set to  0.000000
9/13/2010	2:58:58 PM	SiCl4 MFC set to  0.000000
9/13/2010	2:58:58 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	2:58:58 PM	Tube furnace set to 0
9/13/2010	2:59:59 PM	Helium valve closed
9/13/2010	2:59:59 PM	H2 valve closed
9/13/2010	2:59:59 PM	BCl3 valve closed
9/13/2010	2:59:59 PM	PH3 valve closed
9/13/2010	2:59:59 PM	SiCl4 pre valve closed
9/13/2010	2:59:59 PM	SiCl4 post valve closed
9/13/2010	2:59:59 PM	Bubbler valve closed
9/13/2010	2:59:59 PM	Main Vac valve opened
9/13/2010	2:59:59 PM	Bypass valve opened
9/13/2010	2:59:59 PM	Helium MFC set to  0.000000
9/13/2010	2:59:59 PM	H2 MFC set to  0.000000
9/13/2010	2:59:59 PM	BCl3 MFC set to  0.000000
9/13/2010	2:59:59 PM	PHl3 MFC set to  0.000000
9/13/2010	2:59:59 PM	SiCl4 MFC set to  0.000000
9/13/2010	2:59:59 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	2:59:59 PM	Tube furnace set to 0
9/13/2010	3:00:59 PM	H2 valve closed
9/13/2010	3:00:59 PM	BCl3 valve closed
9/13/2010	3:00:59 PM	PH3 valve closed
9/13/2010	3:00:59 PM	SiCl4 pre valve closed
9/13/2010	3:00:59 PM	SiCl4 post valve closed
9/13/2010	3:00:59 PM	Bubbler valve closed
9/13/2010	3:00:59 PM	Helium valve opened
9/13/2010	3:00:59 PM	Main Vac valve opened
9/13/2010	3:00:59 PM	Bypass valve opened
9/13/2010	3:00:59 PM	Helium MFC set to  100.000000
9/13/2010	3:00:59 PM	H2 MFC set to  0.000000
9/13/2010	3:00:59 PM	BCl3 MFC set to  0.000000
9/13/2010	3:00:59 PM	PHl3 MFC set to  0.000000
9/13/2010	3:00:59 PM	SiCl4 MFC set to  0.000000
9/13/2010	3:00:59 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	3:00:59 PM	Tube furnace set to 0
9/13/2010	3:01:59 PM	Helium valve closed
9/13/2010	3:01:59 PM	H2 valve closed
9/13/2010	3:01:59 PM	BCl3 valve closed
9/13/2010	3:01:59 PM	PH3 valve closed
9/13/2010	3:01:59 PM	SiCl4 pre valve closed
9/13/2010	3:01:59 PM	SiCl4 post valve closed
9/13/2010	3:01:59 PM	Bubbler valve closed
9/13/2010	3:01:59 PM	Main Vac valve opened
9/13/2010	3:01:59 PM	Bypass valve opened
9/13/2010	3:01:59 PM	Helium MFC set to  0.000000
9/13/2010	3:01:59 PM	H2 MFC set to  0.000000
9/13/2010	3:01:59 PM	BCl3 MFC set to  0.000000
9/13/2010	3:01:59 PM	PHl3 MFC set to  0.000000
9/13/2010	3:01:59 PM	SiCl4 MFC set to  0.000000
9/13/2010	3:01:59 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	3:01:59 PM	Tube furnace set to 0
9/13/2010	3:02:59 PM	H2 valve closed
9/13/2010	3:02:59 PM	BCl3 valve closed
9/13/2010	3:02:59 PM	PH3 valve closed
9/13/2010	3:02:59 PM	SiCl4 pre valve closed
9/13/2010	3:02:59 PM	SiCl4 post valve closed
9/13/2010	3:02:59 PM	Bubbler valve closed
9/13/2010	3:02:59 PM	Helium valve opened
9/13/2010	3:02:59 PM	Main Vac valve opened
9/13/2010	3:02:59 PM	Bypass valve opened
9/13/2010	3:02:59 PM	Helium MFC set to  100.000000
9/13/2010	3:02:59 PM	H2 MFC set to  0.000000
9/13/2010	3:02:59 PM	BCl3 MFC set to  0.000000
9/13/2010	3:02:59 PM	PHl3 MFC set to  0.000000
9/13/2010	3:02:59 PM	SiCl4 MFC set to  0.000000
9/13/2010	3:02:59 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	3:02:59 PM	Tube furnace set to 0
9/13/2010	3:03:59 PM	Helium valve closed
9/13/2010	3:03:59 PM	H2 valve closed
9/13/2010	3:03:59 PM	BCl3 valve closed
9/13/2010	3:03:59 PM	PH3 valve closed
9/13/2010	3:03:59 PM	SiCl4 pre valve closed
9/13/2010	3:03:59 PM	SiCl4 post valve closed
9/13/2010	3:03:59 PM	Bubbler valve closed
9/13/2010	3:03:59 PM	Main Vac valve opened
9/13/2010	3:03:59 PM	Bypass valve opened
9/13/2010	3:03:59 PM	Helium MFC set to  0.000000
9/13/2010	3:03:59 PM	H2 MFC set to  0.000000
9/13/2010	3:03:59 PM	BCl3 MFC set to  0.000000
9/13/2010	3:03:59 PM	PHl3 MFC set to  0.000000
9/13/2010	3:03:59 PM	SiCl4 MFC set to  0.000000
9/13/2010	3:03:59 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	3:03:59 PM	Tube furnace set to 0
9/13/2010	3:04:59 PM	H2 valve closed
9/13/2010	3:05:00 PM	BCl3 valve closed
9/13/2010	3:05:00 PM	PH3 valve closed
9/13/2010	3:05:00 PM	SiCl4 pre valve closed
9/13/2010	3:05:00 PM	SiCl4 post valve closed
9/13/2010	3:05:00 PM	Bubbler valve closed
9/13/2010	3:05:00 PM	Helium valve opened
9/13/2010	3:05:00 PM	Main Vac valve opened
9/13/2010	3:05:00 PM	Bypass valve opened
9/13/2010	3:05:00 PM	Helium MFC set to  100.000000
9/13/2010	3:05:00 PM	H2 MFC set to  0.000000
9/13/2010	3:05:00 PM	BCl3 MFC set to  0.000000
9/13/2010	3:05:00 PM	PHl3 MFC set to  0.000000
9/13/2010	3:05:00 PM	SiCl4 MFC set to  0.000000
9/13/2010	3:05:00 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	3:05:00 PM	Tube furnace set to 0
9/13/2010	3:06:00 PM	Helium valve closed
9/13/2010	3:06:00 PM	H2 valve closed
9/13/2010	3:06:00 PM	BCl3 valve closed
9/13/2010	3:06:00 PM	PH3 valve closed
9/13/2010	3:06:00 PM	SiCl4 pre valve closed
9/13/2010	3:06:00 PM	SiCl4 post valve closed
9/13/2010	3:06:00 PM	Bubbler valve closed
9/13/2010	3:06:00 PM	Main Vac valve opened
9/13/2010	3:06:00 PM	Bypass valve opened
9/13/2010	3:06:00 PM	Helium MFC set to  0.000000
9/13/2010	3:06:00 PM	H2 MFC set to  0.000000
9/13/2010	3:06:00 PM	BCl3 MFC set to  0.000000
9/13/2010	3:06:00 PM	PHl3 MFC set to  0.000000
9/13/2010	3:06:00 PM	SiCl4 MFC set to  0.000000
9/13/2010	3:06:00 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	3:06:00 PM	Tube furnace set to 0
9/13/2010	3:07:00 PM	H2 valve closed
9/13/2010	3:07:00 PM	BCl3 valve closed
9/13/2010	3:07:00 PM	PH3 valve closed
9/13/2010	3:07:00 PM	SiCl4 pre valve closed
9/13/2010	3:07:00 PM	SiCl4 post valve closed
9/13/2010	3:07:00 PM	Bubbler valve closed
9/13/2010	3:07:00 PM	Helium valve opened
9/13/2010	3:07:00 PM	Main Vac valve opened
9/13/2010	3:07:00 PM	Bypass valve opened
9/13/2010	3:07:00 PM	Helium MFC set to  100.000000
9/13/2010	3:07:00 PM	H2 MFC set to  0.000000
9/13/2010	3:07:00 PM	BCl3 MFC set to  0.000000
9/13/2010	3:07:00 PM	PHl3 MFC set to  0.000000
9/13/2010	3:07:00 PM	SiCl4 MFC set to  0.000000
9/13/2010	3:07:00 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	3:07:00 PM	Tube furnace set to 0
9/13/2010	3:08:00 PM	Helium valve closed
9/13/2010	3:08:00 PM	H2 valve closed
9/13/2010	3:08:00 PM	BCl3 valve closed
9/13/2010	3:08:00 PM	PH3 valve closed
9/13/2010	3:08:00 PM	SiCl4 pre valve closed
9/13/2010	3:08:00 PM	SiCl4 post valve closed
9/13/2010	3:08:00 PM	Bubbler valve closed
9/13/2010	3:08:00 PM	Main Vac valve opened
9/13/2010	3:08:00 PM	Bypass valve opened
9/13/2010	3:08:00 PM	Helium MFC set to  0.000000
9/13/2010	3:08:00 PM	H2 MFC set to  0.000000
9/13/2010	3:08:00 PM	BCl3 MFC set to  0.000000
9/13/2010	3:08:00 PM	PHl3 MFC set to  0.000000
9/13/2010	3:08:00 PM	SiCl4 MFC set to  0.000000
9/13/2010	3:08:00 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	3:08:00 PM	Tube furnace set to 0
9/13/2010	3:09:00 PM	H2 valve closed
9/13/2010	3:09:00 PM	BCl3 valve closed
9/13/2010	3:09:00 PM	PH3 valve closed
9/13/2010	3:09:00 PM	SiCl4 pre valve closed
9/13/2010	3:09:00 PM	SiCl4 post valve closed
9/13/2010	3:09:00 PM	Bubbler valve closed
9/13/2010	3:09:00 PM	Helium valve opened
9/13/2010	3:09:00 PM	Main Vac valve opened
9/13/2010	3:09:00 PM	Bypass valve opened
9/13/2010	3:09:00 PM	Helium MFC set to  100.000000
9/13/2010	3:09:00 PM	H2 MFC set to  0.000000
9/13/2010	3:09:00 PM	BCl3 MFC set to  0.000000
9/13/2010	3:09:00 PM	PHl3 MFC set to  0.000000
9/13/2010	3:09:00 PM	SiCl4 MFC set to  0.000000
9/13/2010	3:09:00 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	3:09:00 PM	Tube furnace set to 0
9/13/2010	3:10:01 PM	Helium valve closed
9/13/2010	3:10:01 PM	H2 valve closed
9/13/2010	3:10:01 PM	BCl3 valve closed
9/13/2010	3:10:01 PM	PH3 valve closed
9/13/2010	3:10:01 PM	SiCl4 pre valve closed
9/13/2010	3:10:01 PM	SiCl4 post valve closed
9/13/2010	3:10:01 PM	Bubbler valve closed
9/13/2010	3:10:01 PM	Main Vac valve opened
9/13/2010	3:10:01 PM	Bypass valve opened
9/13/2010	3:10:01 PM	Helium MFC set to  0.000000
9/13/2010	3:10:01 PM	H2 MFC set to  0.000000
9/13/2010	3:10:01 PM	BCl3 MFC set to  0.000000
9/13/2010	3:10:01 PM	PHl3 MFC set to  0.000000
9/13/2010	3:10:01 PM	SiCl4 MFC set to  0.000000
9/13/2010	3:10:01 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	3:10:01 PM	Tube furnace set to 0
9/13/2010	3:11:01 PM	H2 valve closed
9/13/2010	3:11:01 PM	BCl3 valve closed
9/13/2010	3:11:01 PM	PH3 valve closed
9/13/2010	3:11:01 PM	SiCl4 pre valve closed
9/13/2010	3:11:01 PM	SiCl4 post valve closed
9/13/2010	3:11:01 PM	Bubbler valve closed
9/13/2010	3:11:01 PM	Helium valve opened
9/13/2010	3:11:01 PM	Main Vac valve opened
9/13/2010	3:11:01 PM	Bypass valve opened
9/13/2010	3:11:01 PM	Helium MFC set to  100.000000
9/13/2010	3:11:01 PM	H2 MFC set to  0.000000
9/13/2010	3:11:01 PM	BCl3 MFC set to  0.000000
9/13/2010	3:11:01 PM	PHl3 MFC set to  0.000000
9/13/2010	3:11:01 PM	SiCl4 MFC set to  0.000000
9/13/2010	3:11:01 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	3:11:01 PM	Tube furnace set to 0
9/13/2010	3:12:01 PM	Helium valve closed
9/13/2010	3:12:01 PM	H2 valve closed
9/13/2010	3:12:01 PM	BCl3 valve closed
9/13/2010	3:12:01 PM	PH3 valve closed
9/13/2010	3:12:01 PM	SiCl4 pre valve closed
9/13/2010	3:12:01 PM	SiCl4 post valve closed
9/13/2010	3:12:01 PM	Bubbler valve closed
9/13/2010	3:12:01 PM	Main Vac valve opened
9/13/2010	3:12:01 PM	Bypass valve opened
9/13/2010	3:12:01 PM	Helium MFC set to  0.000000
9/13/2010	3:12:01 PM	H2 MFC set to  0.000000
9/13/2010	3:12:01 PM	BCl3 MFC set to  0.000000
9/13/2010	3:12:01 PM	PHl3 MFC set to  0.000000
9/13/2010	3:12:01 PM	SiCl4 MFC set to  0.000000
9/13/2010	3:12:01 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	3:12:01 PM	Tube furnace set to 0
9/13/2010	3:13:01 PM	H2 valve closed
9/13/2010	3:13:01 PM	BCl3 valve closed
9/13/2010	3:13:01 PM	PH3 valve closed
9/13/2010	3:13:01 PM	SiCl4 pre valve closed
9/13/2010	3:13:01 PM	SiCl4 post valve closed
9/13/2010	3:13:01 PM	Bubbler valve closed
9/13/2010	3:13:01 PM	Helium valve opened
9/13/2010	3:13:01 PM	Main Vac valve opened
9/13/2010	3:13:01 PM	Bypass valve opened
9/13/2010	3:13:01 PM	Helium MFC set to  100.000000
9/13/2010	3:13:01 PM	H2 MFC set to  0.000000
9/13/2010	3:13:01 PM	BCl3 MFC set to  0.000000
9/13/2010	3:13:01 PM	PHl3 MFC set to  0.000000
9/13/2010	3:13:01 PM	SiCl4 MFC set to  0.000000
9/13/2010	3:13:01 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	3:13:01 PM	Tube furnace set to 0
9/13/2010	3:14:01 PM	Helium valve closed
9/13/2010	3:14:01 PM	H2 valve closed
9/13/2010	3:14:01 PM	BCl3 valve closed
9/13/2010	3:14:01 PM	PH3 valve closed
9/13/2010	3:14:01 PM	SiCl4 pre valve closed
9/13/2010	3:14:01 PM	SiCl4 post valve closed
9/13/2010	3:14:01 PM	Bubbler valve closed
9/13/2010	3:14:01 PM	Main Vac valve opened
9/13/2010	3:14:01 PM	Bypass valve opened
9/13/2010	3:14:01 PM	Helium MFC set to  0.000000
9/13/2010	3:14:01 PM	H2 MFC set to  0.000000
9/13/2010	3:14:01 PM	BCl3 MFC set to  0.000000
9/13/2010	3:14:01 PM	PHl3 MFC set to  0.000000
9/13/2010	3:14:01 PM	SiCl4 MFC set to  0.000000
9/13/2010	3:14:01 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	3:14:01 PM	Tube furnace set to 0
9/13/2010	3:15:02 PM	H2 valve closed
9/13/2010	3:15:02 PM	BCl3 valve closed
9/13/2010	3:15:02 PM	PH3 valve closed
9/13/2010	3:15:02 PM	SiCl4 pre valve closed
9/13/2010	3:15:02 PM	SiCl4 post valve closed
9/13/2010	3:15:02 PM	Bubbler valve closed
9/13/2010	3:15:02 PM	Helium valve opened
9/13/2010	3:15:02 PM	Main Vac valve opened
9/13/2010	3:15:02 PM	Bypass valve opened
9/13/2010	3:15:02 PM	Helium MFC set to  100.000000
9/13/2010	3:15:02 PM	H2 MFC set to  0.000000
9/13/2010	3:15:02 PM	BCl3 MFC set to  0.000000
9/13/2010	3:15:02 PM	PHl3 MFC set to  0.000000
9/13/2010	3:15:02 PM	SiCl4 MFC set to  0.000000
9/13/2010	3:15:02 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	3:15:02 PM	Tube furnace set to 0
9/13/2010	3:16:02 PM	Helium valve closed
9/13/2010	3:16:02 PM	H2 valve closed
9/13/2010	3:16:02 PM	BCl3 valve closed
9/13/2010	3:16:02 PM	PH3 valve closed
9/13/2010	3:16:02 PM	SiCl4 pre valve closed
9/13/2010	3:16:02 PM	SiCl4 post valve closed
9/13/2010	3:16:02 PM	Bubbler valve closed
9/13/2010	3:16:02 PM	Main Vac valve opened
9/13/2010	3:16:02 PM	Bypass valve opened
9/13/2010	3:16:02 PM	Helium MFC set to  0.000000
9/13/2010	3:16:02 PM	H2 MFC set to  0.000000
9/13/2010	3:16:02 PM	BCl3 MFC set to  0.000000
9/13/2010	3:16:02 PM	PHl3 MFC set to  0.000000
9/13/2010	3:16:02 PM	SiCl4 MFC set to  0.000000
9/13/2010	3:16:02 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	3:16:02 PM	Tube furnace set to 0
9/13/2010	3:16:03 PM	Run finished at 3:16 PM
9/13/2010	3:16:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/13/2010	3:35:54 PM	Recipe started at 3:35 PM
9/13/2010	3:35:54 PM	Helium valve closed
9/13/2010	3:35:54 PM	BCl3 valve closed
9/13/2010	3:35:54 PM	PH3 valve closed
9/13/2010	3:35:54 PM	SiCl4 pre valve closed
9/13/2010	3:35:54 PM	SiCl4 post valve closed
9/13/2010	3:35:54 PM	Main Vac valve closed
9/13/2010	3:35:54 PM	Bypass valve closed
9/13/2010	3:35:54 PM	Bubbler valve closed
9/13/2010	3:35:54 PM	H2 valve opened
9/13/2010	3:35:54 PM	Helium MFC set to  0.000000
9/13/2010	3:35:54 PM	H2 MFC set to  500.000000
9/13/2010	3:35:54 PM	BCl3 MFC set to  0.000000
9/13/2010	3:35:54 PM	PHl3 MFC set to  0.000000
9/13/2010	3:35:54 PM	SiCl4 MFC set to  0.000000
9/13/2010	3:35:54 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	3:35:54 PM	Tube furnace set to 0
9/13/2010	3:37:16 PM	Helium valve closed
9/13/2010	3:37:16 PM	BCl3 valve closed
9/13/2010	3:37:16 PM	PH3 valve closed
9/13/2010	3:37:16 PM	SiCl4 pre valve closed
9/13/2010	3:37:16 PM	SiCl4 post valve closed
9/13/2010	3:37:16 PM	Main Vac valve closed
9/13/2010	3:37:16 PM	Bypass valve closed
9/13/2010	3:37:16 PM	H2 valve opened
9/13/2010	3:37:16 PM	Bubbler valve opened
9/13/2010	3:37:16 PM	Helium MFC set to  0.000000
9/13/2010	3:37:16 PM	H2 MFC set to  500.000000
9/13/2010	3:37:16 PM	BCl3 MFC set to  0.000000
9/13/2010	3:37:16 PM	PHl3 MFC set to  0.000000
9/13/2010	3:37:16 PM	SiCl4 MFC set to  0.000000
9/13/2010	3:37:16 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	3:37:16 PM	Tube furnace set to 1000
9/13/2010	3:57:16 PM	Helium valve closed
9/13/2010	3:57:16 PM	BCl3 valve closed
9/13/2010	3:57:16 PM	Main Vac valve closed
9/13/2010	3:57:16 PM	Bypass valve closed
9/13/2010	3:57:16 PM	H2 valve opened
9/13/2010	3:57:16 PM	PH3 valve opened
9/13/2010	3:57:16 PM	SiCl4 pre valve opened
9/13/2010	3:57:16 PM	SiCl4 post valve opened
9/13/2010	3:57:16 PM	Bubbler valve opened
9/13/2010	3:57:16 PM	Helium MFC set to  0.000000
9/13/2010	3:57:16 PM	H2 MFC set to  500.000000
9/13/2010	3:57:16 PM	BCl3 MFC set to  0.000000
9/13/2010	3:57:16 PM	PHl3 MFC set to  1.000000
9/13/2010	3:57:16 PM	SiCl4 MFC set to  50.000000
9/13/2010	3:57:16 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	3:57:16 PM	Tube furnace set to 1000
9/13/2010	4:12:16 PM	H2 valve closed
9/13/2010	4:12:16 PM	BCl3 valve closed
9/13/2010	4:12:16 PM	PH3 valve closed
9/13/2010	4:12:16 PM	SiCl4 pre valve closed
9/13/2010	4:12:16 PM	SiCl4 post valve closed
9/13/2010	4:12:16 PM	Main Vac valve closed
9/13/2010	4:12:16 PM	Bypass valve closed
9/13/2010	4:12:16 PM	Helium valve opened
9/13/2010	4:12:16 PM	Bubbler valve opened
9/13/2010	4:12:16 PM	Helium MFC set to  500.000000
9/13/2010	4:12:16 PM	H2 MFC set to  0.000000
9/13/2010	4:12:16 PM	BCl3 MFC set to  0.000000
9/13/2010	4:12:16 PM	PHl3 MFC set to  0.000000
9/13/2010	4:12:16 PM	SiCl4 MFC set to  0.000000
9/13/2010	4:12:16 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	4:12:16 PM	Tube furnace set to 0
9/13/2010	4:32:16 PM	Helium valve closed
9/13/2010	4:32:16 PM	H2 valve closed
9/13/2010	4:32:16 PM	BCl3 valve closed
9/13/2010	4:32:16 PM	PH3 valve closed
9/13/2010	4:32:16 PM	SiCl4 pre valve closed
9/13/2010	4:32:16 PM	SiCl4 post valve closed
9/13/2010	4:32:16 PM	Main Vac valve closed
9/13/2010	4:32:16 PM	Bypass valve closed
9/13/2010	4:32:16 PM	Bubbler valve closed
9/13/2010	4:32:16 PM	Helium MFC set to  0.000000
9/13/2010	4:32:16 PM	H2 MFC set to  0.000000
9/13/2010	4:32:16 PM	BCl3 MFC set to  0.000000
9/13/2010	4:32:16 PM	PHl3 MFC set to  0.000000
9/13/2010	4:32:16 PM	SiCl4 MFC set to  0.000000
9/13/2010	4:32:16 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	4:32:16 PM	Tube furnace set to 0
9/13/2010	4:32:17 PM	Run finished at 4:32 PM
9/13/2010	4:39:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/13/2010	4:39:29 PM	Recipe started at 4:39 PM
9/13/2010	4:39:29 PM	H2 valve closed
9/13/2010	4:39:29 PM	BCl3 valve closed
9/13/2010	4:39:29 PM	PH3 valve closed
9/13/2010	4:39:29 PM	SiCl4 pre valve closed
9/13/2010	4:39:29 PM	SiCl4 post valve closed
9/13/2010	4:39:29 PM	Main Vac valve closed
9/13/2010	4:39:29 PM	Bypass valve closed
9/13/2010	4:39:29 PM	Bubbler valve closed
9/13/2010	4:39:29 PM	Helium valve opened
9/13/2010	4:39:29 PM	Helium MFC set to  500.000000
9/13/2010	4:39:29 PM	H2 MFC set to  0.000000
9/13/2010	4:39:29 PM	BCl3 MFC set to  0.000000
9/13/2010	4:39:29 PM	PHl3 MFC set to  0.000000
9/13/2010	4:39:29 PM	SiCl4 MFC set to  0.000000
9/13/2010	4:39:29 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	4:39:29 PM	Tube furnace set to 0
9/13/2010	4:39:31 PM	Helium valve closed
9/13/2010	4:39:31 PM	H2 valve closed
9/13/2010	4:39:31 PM	BCl3 valve closed
9/13/2010	4:39:31 PM	PH3 valve closed
9/13/2010	4:39:31 PM	SiCl4 pre valve closed
9/13/2010	4:39:31 PM	SiCl4 post valve closed
9/13/2010	4:39:31 PM	Main Vac valve closed
9/13/2010	4:39:31 PM	Bypass valve closed
9/13/2010	4:39:31 PM	Bubbler valve closed
9/13/2010	4:39:31 PM	Helium MFC set to  0.000000
9/13/2010	4:39:31 PM	H2 MFC set to  0.000000
9/13/2010	4:39:31 PM	BCl3 MFC set to  0.000000
9/13/2010	4:39:31 PM	PHl3 MFC set to  0.000000
9/13/2010	4:39:31 PM	SiCl4 MFC set to  0.000000
9/13/2010	4:39:31 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	4:39:32 PM	Tube furnace set to 0
9/13/2010	4:39:32 PM	Run finished at 4:39 PM
9/13/2010	4:39:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/13/2010	5:20:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/13/2010	5:20:05 PM	Recipe started at 5:20 PM
9/13/2010	5:20:05 PM	Helium valve closed
9/13/2010	5:20:05 PM	H2 valve closed
9/13/2010	5:20:05 PM	BCl3 valve closed
9/13/2010	5:20:05 PM	PH3 valve closed
9/13/2010	5:20:05 PM	SiCl4 pre valve closed
9/13/2010	5:20:05 PM	SiCl4 post valve closed
9/13/2010	5:20:05 PM	Main Vac valve closed
9/13/2010	5:20:05 PM	Bubbler valve closed
9/13/2010	5:20:05 PM	Bypass valve opened
9/13/2010	5:20:05 PM	Helium MFC set to  0.000000
9/13/2010	5:20:05 PM	H2 MFC set to  0.000000
9/13/2010	5:20:05 PM	BCl3 MFC set to  0.000000
9/13/2010	5:20:05 PM	PHl3 MFC set to  0.000000
9/13/2010	5:20:05 PM	SiCl4 MFC set to  0.000000
9/13/2010	5:20:05 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	5:20:05 PM	Tube furnace set to 0
9/13/2010	5:20:49 PM	Helium valve closed
9/13/2010	5:20:49 PM	H2 valve closed
9/13/2010	5:20:49 PM	BCl3 valve closed
9/13/2010	5:20:49 PM	PH3 valve closed
9/13/2010	5:20:49 PM	SiCl4 pre valve closed
9/13/2010	5:20:49 PM	SiCl4 post valve closed
9/13/2010	5:20:49 PM	Bubbler valve closed
9/13/2010	5:20:49 PM	Main Vac valve opened
9/13/2010	5:20:49 PM	Bypass valve opened
9/13/2010	5:20:49 PM	Helium MFC set to  0.000000
9/13/2010	5:20:49 PM	H2 MFC set to  0.000000
9/13/2010	5:20:49 PM	BCl3 MFC set to  0.000000
9/13/2010	5:20:49 PM	PHl3 MFC set to  0.000000
9/13/2010	5:20:49 PM	SiCl4 MFC set to  0.000000
9/13/2010	5:20:49 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	5:20:49 PM	Tube furnace set to 0
9/13/2010	5:20:49 PM	Run finished at 5:20 PM
9/13/2010	5:20:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/13/2010	5:21:34 PM	Bypass valve closed
9/13/2010	5:21:36 PM	Main Vac valve closed
9/13/2010	5:21:53 PM	Main Vac valve opened
9/13/2010	5:21:56 PM	Bypass valve opened
9/13/2010	5:23:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/13/2010	5:23:30 PM	Recipe started at 5:23 PM
9/13/2010	5:23:30 PM	Helium valve closed
9/13/2010	5:23:30 PM	H2 valve closed
9/13/2010	5:23:30 PM	BCl3 valve closed
9/13/2010	5:23:30 PM	PH3 valve closed
9/13/2010	5:23:30 PM	SiCl4 pre valve closed
9/13/2010	5:23:30 PM	SiCl4 post valve closed
9/13/2010	5:23:30 PM	Main Vac valve closed
9/13/2010	5:23:30 PM	Bubbler valve closed
9/13/2010	5:23:30 PM	Bypass valve opened
9/13/2010	5:23:30 PM	Helium MFC set to  0.000000
9/13/2010	5:23:30 PM	H2 MFC set to  0.000000
9/13/2010	5:23:30 PM	BCl3 MFC set to  0.000000
9/13/2010	5:23:30 PM	PHl3 MFC set to  0.000000
9/13/2010	5:23:30 PM	SiCl4 MFC set to  0.000000
9/13/2010	5:23:30 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	5:23:30 PM	Tube furnace set to 0
9/13/2010	5:23:30 PM	Helium valve closed
9/13/2010	5:23:30 PM	H2 valve closed
9/13/2010	5:23:30 PM	BCl3 valve closed
9/13/2010	5:23:30 PM	PH3 valve closed
9/13/2010	5:23:30 PM	SiCl4 pre valve closed
9/13/2010	5:23:30 PM	SiCl4 post valve closed
9/13/2010	5:23:30 PM	Bubbler valve closed
9/13/2010	5:23:30 PM	Main Vac valve opened
9/13/2010	5:23:30 PM	Bypass valve opened
9/13/2010	5:23:30 PM	Helium MFC set to  0.000000
9/13/2010	5:23:30 PM	H2 MFC set to  0.000000
9/13/2010	5:23:30 PM	BCl3 MFC set to  0.000000
9/13/2010	5:23:30 PM	PHl3 MFC set to  0.000000
9/13/2010	5:23:30 PM	SiCl4 MFC set to  0.000000
9/13/2010	5:23:30 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	5:23:30 PM	Tube furnace set to 0
9/13/2010	5:24:30 PM	H2 valve closed
9/13/2010	5:24:30 PM	BCl3 valve closed
9/13/2010	5:24:30 PM	PH3 valve closed
9/13/2010	5:24:30 PM	SiCl4 pre valve closed
9/13/2010	5:24:30 PM	SiCl4 post valve closed
9/13/2010	5:24:30 PM	Bubbler valve closed
9/13/2010	5:24:30 PM	Helium valve opened
9/13/2010	5:24:30 PM	Main Vac valve opened
9/13/2010	5:24:30 PM	Bypass valve opened
9/13/2010	5:24:30 PM	Helium MFC set to  100.000000
9/13/2010	5:24:30 PM	H2 MFC set to  0.000000
9/13/2010	5:24:30 PM	BCl3 MFC set to  0.000000
9/13/2010	5:24:30 PM	PHl3 MFC set to  0.000000
9/13/2010	5:24:30 PM	SiCl4 MFC set to  0.000000
9/13/2010	5:24:30 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	5:24:31 PM	Tube furnace set to 0
9/13/2010	5:25:31 PM	Helium valve closed
9/13/2010	5:25:31 PM	H2 valve closed
9/13/2010	5:25:31 PM	BCl3 valve closed
9/13/2010	5:25:31 PM	PH3 valve closed
9/13/2010	5:25:31 PM	SiCl4 pre valve closed
9/13/2010	5:25:31 PM	SiCl4 post valve closed
9/13/2010	5:25:31 PM	Bubbler valve closed
9/13/2010	5:25:31 PM	Main Vac valve opened
9/13/2010	5:25:31 PM	Bypass valve opened
9/13/2010	5:25:31 PM	Helium MFC set to  0.000000
9/13/2010	5:25:31 PM	H2 MFC set to  0.000000
9/13/2010	5:25:31 PM	BCl3 MFC set to  0.000000
9/13/2010	5:25:31 PM	PHl3 MFC set to  0.000000
9/13/2010	5:25:31 PM	SiCl4 MFC set to  0.000000
9/13/2010	5:25:31 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	5:25:31 PM	Tube furnace set to 0
9/13/2010	5:26:31 PM	H2 valve closed
9/13/2010	5:26:31 PM	BCl3 valve closed
9/13/2010	5:26:31 PM	PH3 valve closed
9/13/2010	5:26:31 PM	SiCl4 pre valve closed
9/13/2010	5:26:31 PM	SiCl4 post valve closed
9/13/2010	5:26:31 PM	Bubbler valve closed
9/13/2010	5:26:31 PM	Helium valve opened
9/13/2010	5:26:31 PM	Main Vac valve opened
9/13/2010	5:26:31 PM	Bypass valve opened
9/13/2010	5:26:31 PM	Helium MFC set to  100.000000
9/13/2010	5:26:31 PM	H2 MFC set to  0.000000
9/13/2010	5:26:31 PM	BCl3 MFC set to  0.000000
9/13/2010	5:26:31 PM	PHl3 MFC set to  0.000000
9/13/2010	5:26:31 PM	SiCl4 MFC set to  0.000000
9/13/2010	5:26:31 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	5:26:31 PM	Tube furnace set to 0
9/13/2010	5:27:31 PM	Helium valve closed
9/13/2010	5:27:31 PM	H2 valve closed
9/13/2010	5:27:31 PM	BCl3 valve closed
9/13/2010	5:27:31 PM	PH3 valve closed
9/13/2010	5:27:31 PM	SiCl4 pre valve closed
9/13/2010	5:27:31 PM	SiCl4 post valve closed
9/13/2010	5:27:31 PM	Bubbler valve closed
9/13/2010	5:27:31 PM	Main Vac valve opened
9/13/2010	5:27:31 PM	Bypass valve opened
9/13/2010	5:27:31 PM	Helium MFC set to  0.000000
9/13/2010	5:27:31 PM	H2 MFC set to  0.000000
9/13/2010	5:27:31 PM	BCl3 MFC set to  0.000000
9/13/2010	5:27:31 PM	PHl3 MFC set to  0.000000
9/13/2010	5:27:31 PM	SiCl4 MFC set to  0.000000
9/13/2010	5:27:31 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	5:27:31 PM	Tube furnace set to 0
9/13/2010	5:28:31 PM	H2 valve closed
9/13/2010	5:28:31 PM	BCl3 valve closed
9/13/2010	5:28:31 PM	PH3 valve closed
9/13/2010	5:28:31 PM	SiCl4 pre valve closed
9/13/2010	5:28:31 PM	SiCl4 post valve closed
9/13/2010	5:28:31 PM	Bubbler valve closed
9/13/2010	5:28:31 PM	Helium valve opened
9/13/2010	5:28:31 PM	Main Vac valve opened
9/13/2010	5:28:31 PM	Bypass valve opened
9/13/2010	5:28:31 PM	Helium MFC set to  100.000000
9/13/2010	5:28:31 PM	H2 MFC set to  0.000000
9/13/2010	5:28:31 PM	BCl3 MFC set to  0.000000
9/13/2010	5:28:31 PM	PHl3 MFC set to  0.000000
9/13/2010	5:28:31 PM	SiCl4 MFC set to  0.000000
9/13/2010	5:28:31 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	5:28:31 PM	Tube furnace set to 0
9/13/2010	5:29:31 PM	Helium valve closed
9/13/2010	5:29:31 PM	H2 valve closed
9/13/2010	5:29:31 PM	BCl3 valve closed
9/13/2010	5:29:31 PM	PH3 valve closed
9/13/2010	5:29:31 PM	SiCl4 pre valve closed
9/13/2010	5:29:31 PM	SiCl4 post valve closed
9/13/2010	5:29:31 PM	Bubbler valve closed
9/13/2010	5:29:31 PM	Main Vac valve opened
9/13/2010	5:29:31 PM	Bypass valve opened
9/13/2010	5:29:31 PM	Helium MFC set to  0.000000
9/13/2010	5:29:31 PM	H2 MFC set to  0.000000
9/13/2010	5:29:31 PM	BCl3 MFC set to  0.000000
9/13/2010	5:29:31 PM	PHl3 MFC set to  0.000000
9/13/2010	5:29:31 PM	SiCl4 MFC set to  0.000000
9/13/2010	5:29:31 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	5:29:32 PM	Tube furnace set to 0
9/13/2010	5:30:32 PM	H2 valve closed
9/13/2010	5:30:32 PM	BCl3 valve closed
9/13/2010	5:30:32 PM	PH3 valve closed
9/13/2010	5:30:32 PM	SiCl4 pre valve closed
9/13/2010	5:30:32 PM	SiCl4 post valve closed
9/13/2010	5:30:32 PM	Bubbler valve closed
9/13/2010	5:30:32 PM	Helium valve opened
9/13/2010	5:30:32 PM	Main Vac valve opened
9/13/2010	5:30:32 PM	Bypass valve opened
9/13/2010	5:30:32 PM	Helium MFC set to  100.000000
9/13/2010	5:30:32 PM	H2 MFC set to  0.000000
9/13/2010	5:30:32 PM	BCl3 MFC set to  0.000000
9/13/2010	5:30:32 PM	PHl3 MFC set to  0.000000
9/13/2010	5:30:32 PM	SiCl4 MFC set to  0.000000
9/13/2010	5:30:32 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	5:30:32 PM	Tube furnace set to 0
9/13/2010	5:31:32 PM	Helium valve closed
9/13/2010	5:31:32 PM	H2 valve closed
9/13/2010	5:31:32 PM	BCl3 valve closed
9/13/2010	5:31:32 PM	PH3 valve closed
9/13/2010	5:31:32 PM	SiCl4 pre valve closed
9/13/2010	5:31:32 PM	SiCl4 post valve closed
9/13/2010	5:31:32 PM	Bubbler valve closed
9/13/2010	5:31:32 PM	Main Vac valve opened
9/13/2010	5:31:32 PM	Bypass valve opened
9/13/2010	5:31:32 PM	Helium MFC set to  0.000000
9/13/2010	5:31:32 PM	H2 MFC set to  0.000000
9/13/2010	5:31:32 PM	BCl3 MFC set to  0.000000
9/13/2010	5:31:32 PM	PHl3 MFC set to  0.000000
9/13/2010	5:31:32 PM	SiCl4 MFC set to  0.000000
9/13/2010	5:31:32 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	5:31:32 PM	Tube furnace set to 0
9/13/2010	5:32:32 PM	H2 valve closed
9/13/2010	5:32:32 PM	BCl3 valve closed
9/13/2010	5:32:32 PM	PH3 valve closed
9/13/2010	5:32:32 PM	SiCl4 pre valve closed
9/13/2010	5:32:32 PM	SiCl4 post valve closed
9/13/2010	5:32:32 PM	Bubbler valve closed
9/13/2010	5:32:32 PM	Helium valve opened
9/13/2010	5:32:32 PM	Main Vac valve opened
9/13/2010	5:32:32 PM	Bypass valve opened
9/13/2010	5:32:32 PM	Helium MFC set to  100.000000
9/13/2010	5:32:32 PM	H2 MFC set to  0.000000
9/13/2010	5:32:32 PM	BCl3 MFC set to  0.000000
9/13/2010	5:32:32 PM	PHl3 MFC set to  0.000000
9/13/2010	5:32:32 PM	SiCl4 MFC set to  0.000000
9/13/2010	5:32:32 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	5:32:32 PM	Tube furnace set to 0
9/13/2010	5:33:32 PM	Helium valve closed
9/13/2010	5:33:32 PM	H2 valve closed
9/13/2010	5:33:32 PM	BCl3 valve closed
9/13/2010	5:33:32 PM	PH3 valve closed
9/13/2010	5:33:32 PM	SiCl4 pre valve closed
9/13/2010	5:33:32 PM	SiCl4 post valve closed
9/13/2010	5:33:32 PM	Bubbler valve closed
9/13/2010	5:33:32 PM	Main Vac valve opened
9/13/2010	5:33:32 PM	Bypass valve opened
9/13/2010	5:33:32 PM	Helium MFC set to  0.000000
9/13/2010	5:33:32 PM	H2 MFC set to  0.000000
9/13/2010	5:33:32 PM	BCl3 MFC set to  0.000000
9/13/2010	5:33:32 PM	PHl3 MFC set to  0.000000
9/13/2010	5:33:32 PM	SiCl4 MFC set to  0.000000
9/13/2010	5:33:32 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	5:33:32 PM	Tube furnace set to 0
9/13/2010	5:34:32 PM	H2 valve closed
9/13/2010	5:34:32 PM	BCl3 valve closed
9/13/2010	5:34:32 PM	PH3 valve closed
9/13/2010	5:34:32 PM	SiCl4 pre valve closed
9/13/2010	5:34:32 PM	SiCl4 post valve closed
9/13/2010	5:34:32 PM	Bubbler valve closed
9/13/2010	5:34:32 PM	Helium valve opened
9/13/2010	5:34:32 PM	Main Vac valve opened
9/13/2010	5:34:32 PM	Bypass valve opened
9/13/2010	5:34:32 PM	Helium MFC set to  100.000000
9/13/2010	5:34:32 PM	H2 MFC set to  0.000000
9/13/2010	5:34:32 PM	BCl3 MFC set to  0.000000
9/13/2010	5:34:32 PM	PHl3 MFC set to  0.000000
9/13/2010	5:34:32 PM	SiCl4 MFC set to  0.000000
9/13/2010	5:34:32 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	5:34:33 PM	Tube furnace set to 0
9/13/2010	5:35:33 PM	Helium valve closed
9/13/2010	5:35:33 PM	H2 valve closed
9/13/2010	5:35:33 PM	BCl3 valve closed
9/13/2010	5:35:33 PM	PH3 valve closed
9/13/2010	5:35:33 PM	SiCl4 pre valve closed
9/13/2010	5:35:33 PM	SiCl4 post valve closed
9/13/2010	5:35:33 PM	Bubbler valve closed
9/13/2010	5:35:33 PM	Main Vac valve opened
9/13/2010	5:35:33 PM	Bypass valve opened
9/13/2010	5:35:33 PM	Helium MFC set to  0.000000
9/13/2010	5:35:33 PM	H2 MFC set to  0.000000
9/13/2010	5:35:33 PM	BCl3 MFC set to  0.000000
9/13/2010	5:35:33 PM	PHl3 MFC set to  0.000000
9/13/2010	5:35:33 PM	SiCl4 MFC set to  0.000000
9/13/2010	5:35:33 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	5:35:33 PM	Tube furnace set to 0
9/13/2010	5:36:33 PM	H2 valve closed
9/13/2010	5:36:33 PM	BCl3 valve closed
9/13/2010	5:36:33 PM	PH3 valve closed
9/13/2010	5:36:33 PM	SiCl4 pre valve closed
9/13/2010	5:36:33 PM	SiCl4 post valve closed
9/13/2010	5:36:33 PM	Bubbler valve closed
9/13/2010	5:36:33 PM	Helium valve opened
9/13/2010	5:36:33 PM	Main Vac valve opened
9/13/2010	5:36:33 PM	Bypass valve opened
9/13/2010	5:36:33 PM	Helium MFC set to  100.000000
9/13/2010	5:36:33 PM	H2 MFC set to  0.000000
9/13/2010	5:36:33 PM	BCl3 MFC set to  0.000000
9/13/2010	5:36:33 PM	PHl3 MFC set to  0.000000
9/13/2010	5:36:33 PM	SiCl4 MFC set to  0.000000
9/13/2010	5:36:33 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	5:36:33 PM	Tube furnace set to 0
9/13/2010	5:37:33 PM	Helium valve closed
9/13/2010	5:37:33 PM	H2 valve closed
9/13/2010	5:37:33 PM	BCl3 valve closed
9/13/2010	5:37:33 PM	PH3 valve closed
9/13/2010	5:37:33 PM	SiCl4 pre valve closed
9/13/2010	5:37:33 PM	SiCl4 post valve closed
9/13/2010	5:37:33 PM	Bubbler valve closed
9/13/2010	5:37:33 PM	Main Vac valve opened
9/13/2010	5:37:33 PM	Bypass valve opened
9/13/2010	5:37:33 PM	Helium MFC set to  0.000000
9/13/2010	5:37:33 PM	H2 MFC set to  0.000000
9/13/2010	5:37:33 PM	BCl3 MFC set to  0.000000
9/13/2010	5:37:33 PM	PHl3 MFC set to  0.000000
9/13/2010	5:37:33 PM	SiCl4 MFC set to  0.000000
9/13/2010	5:37:33 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	5:37:33 PM	Tube furnace set to 0
9/13/2010	5:38:33 PM	H2 valve closed
9/13/2010	5:38:33 PM	BCl3 valve closed
9/13/2010	5:38:33 PM	PH3 valve closed
9/13/2010	5:38:33 PM	SiCl4 pre valve closed
9/13/2010	5:38:33 PM	SiCl4 post valve closed
9/13/2010	5:38:33 PM	Bubbler valve closed
9/13/2010	5:38:33 PM	Helium valve opened
9/13/2010	5:38:33 PM	Main Vac valve opened
9/13/2010	5:38:33 PM	Bypass valve opened
9/13/2010	5:38:33 PM	Helium MFC set to  100.000000
9/13/2010	5:38:33 PM	H2 MFC set to  0.000000
9/13/2010	5:38:33 PM	BCl3 MFC set to  0.000000
9/13/2010	5:38:33 PM	PHl3 MFC set to  0.000000
9/13/2010	5:38:33 PM	SiCl4 MFC set to  0.000000
9/13/2010	5:38:33 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	5:38:33 PM	Tube furnace set to 0
9/13/2010	5:39:34 PM	Helium valve closed
9/13/2010	5:39:34 PM	H2 valve closed
9/13/2010	5:39:34 PM	BCl3 valve closed
9/13/2010	5:39:34 PM	PH3 valve closed
9/13/2010	5:39:34 PM	SiCl4 pre valve closed
9/13/2010	5:39:34 PM	SiCl4 post valve closed
9/13/2010	5:39:34 PM	Bubbler valve closed
9/13/2010	5:39:34 PM	Main Vac valve opened
9/13/2010	5:39:34 PM	Bypass valve opened
9/13/2010	5:39:34 PM	Helium MFC set to  0.000000
9/13/2010	5:39:34 PM	H2 MFC set to  0.000000
9/13/2010	5:39:34 PM	BCl3 MFC set to  0.000000
9/13/2010	5:39:34 PM	PHl3 MFC set to  0.000000
9/13/2010	5:39:34 PM	SiCl4 MFC set to  0.000000
9/13/2010	5:39:34 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	5:39:34 PM	Tube furnace set to 0
9/13/2010	5:40:34 PM	H2 valve closed
9/13/2010	5:40:34 PM	BCl3 valve closed
9/13/2010	5:40:34 PM	PH3 valve closed
9/13/2010	5:40:34 PM	SiCl4 pre valve closed
9/13/2010	5:40:34 PM	SiCl4 post valve closed
9/13/2010	5:40:34 PM	Bubbler valve closed
9/13/2010	5:40:34 PM	Helium valve opened
9/13/2010	5:40:34 PM	Main Vac valve opened
9/13/2010	5:40:34 PM	Bypass valve opened
9/13/2010	5:40:34 PM	Helium MFC set to  100.000000
9/13/2010	5:40:34 PM	H2 MFC set to  0.000000
9/13/2010	5:40:34 PM	BCl3 MFC set to  0.000000
9/13/2010	5:40:34 PM	PHl3 MFC set to  0.000000
9/13/2010	5:40:34 PM	SiCl4 MFC set to  0.000000
9/13/2010	5:40:34 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	5:40:34 PM	Tube furnace set to 0
9/13/2010	5:41:34 PM	Helium valve closed
9/13/2010	5:41:34 PM	H2 valve closed
9/13/2010	5:41:34 PM	BCl3 valve closed
9/13/2010	5:41:34 PM	PH3 valve closed
9/13/2010	5:41:34 PM	SiCl4 pre valve closed
9/13/2010	5:41:34 PM	SiCl4 post valve closed
9/13/2010	5:41:34 PM	Bubbler valve closed
9/13/2010	5:41:34 PM	Main Vac valve opened
9/13/2010	5:41:34 PM	Bypass valve opened
9/13/2010	5:41:34 PM	Helium MFC set to  0.000000
9/13/2010	5:41:34 PM	H2 MFC set to  0.000000
9/13/2010	5:41:34 PM	BCl3 MFC set to  0.000000
9/13/2010	5:41:34 PM	PHl3 MFC set to  0.000000
9/13/2010	5:41:34 PM	SiCl4 MFC set to  0.000000
9/13/2010	5:41:34 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	5:41:34 PM	Tube furnace set to 0
9/13/2010	5:42:34 PM	H2 valve closed
9/13/2010	5:42:34 PM	BCl3 valve closed
9/13/2010	5:42:34 PM	PH3 valve closed
9/13/2010	5:42:34 PM	SiCl4 pre valve closed
9/13/2010	5:42:34 PM	SiCl4 post valve closed
9/13/2010	5:42:34 PM	Bubbler valve closed
9/13/2010	5:42:34 PM	Helium valve opened
9/13/2010	5:42:34 PM	Main Vac valve opened
9/13/2010	5:42:34 PM	Bypass valve opened
9/13/2010	5:42:34 PM	Helium MFC set to  100.000000
9/13/2010	5:42:34 PM	H2 MFC set to  0.000000
9/13/2010	5:42:34 PM	BCl3 MFC set to  0.000000
9/13/2010	5:42:34 PM	PHl3 MFC set to  0.000000
9/13/2010	5:42:34 PM	SiCl4 MFC set to  0.000000
9/13/2010	5:42:34 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	5:42:34 PM	Tube furnace set to 0
9/13/2010	5:43:34 PM	Helium valve closed
9/13/2010	5:43:34 PM	H2 valve closed
9/13/2010	5:43:34 PM	BCl3 valve closed
9/13/2010	5:43:34 PM	PH3 valve closed
9/13/2010	5:43:34 PM	SiCl4 pre valve closed
9/13/2010	5:43:34 PM	SiCl4 post valve closed
9/13/2010	5:43:34 PM	Bubbler valve closed
9/13/2010	5:43:34 PM	Main Vac valve opened
9/13/2010	5:43:34 PM	Bypass valve opened
9/13/2010	5:43:34 PM	Helium MFC set to  0.000000
9/13/2010	5:43:34 PM	H2 MFC set to  0.000000
9/13/2010	5:43:34 PM	BCl3 MFC set to  0.000000
9/13/2010	5:43:34 PM	PHl3 MFC set to  0.000000
9/13/2010	5:43:34 PM	SiCl4 MFC set to  0.000000
9/13/2010	5:43:34 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	5:43:35 PM	Tube furnace set to 0
9/13/2010	5:43:36 PM	Run finished at 5:43 PM
9/13/2010	5:43:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/13/2010	5:47:45 PM	Helium MFC set to  100.000000
9/13/2010	5:47:46 PM	Helium valve opened
9/13/2010	5:47:52 PM	Helium valve closed
9/13/2010	5:47:55 PM	Helium MFC set to  0.000000
9/13/2010	5:48:00 PM	Helium valve opened
9/13/2010	5:48:03 PM	Helium valve closed
9/13/2010	5:50:15 PM	Recipe started at 5:50 PM
9/13/2010	5:50:15 PM	Helium valve closed
9/13/2010	5:50:15 PM	BCl3 valve closed
9/13/2010	5:50:15 PM	PH3 valve closed
9/13/2010	5:50:15 PM	SiCl4 pre valve closed
9/13/2010	5:50:15 PM	SiCl4 post valve closed
9/13/2010	5:50:15 PM	Main Vac valve closed
9/13/2010	5:50:15 PM	Bypass valve closed
9/13/2010	5:50:15 PM	Bubbler valve closed
9/13/2010	5:50:15 PM	H2 valve opened
9/13/2010	5:50:15 PM	Helium MFC set to  0.000000
9/13/2010	5:50:15 PM	H2 MFC set to  500.000000
9/13/2010	5:50:15 PM	BCl3 MFC set to  0.000000
9/13/2010	5:50:15 PM	PHl3 MFC set to  0.000000
9/13/2010	5:50:15 PM	SiCl4 MFC set to  0.000000
9/13/2010	5:50:15 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	5:50:15 PM	Tube furnace set to 0
9/13/2010	5:51:35 PM	Helium valve closed
9/13/2010	5:51:35 PM	BCl3 valve closed
9/13/2010	5:51:35 PM	PH3 valve closed
9/13/2010	5:51:35 PM	SiCl4 pre valve closed
9/13/2010	5:51:35 PM	SiCl4 post valve closed
9/13/2010	5:51:35 PM	Main Vac valve closed
9/13/2010	5:51:35 PM	Bypass valve closed
9/13/2010	5:51:35 PM	H2 valve opened
9/13/2010	5:51:35 PM	Bubbler valve opened
9/13/2010	5:51:35 PM	Helium MFC set to  0.000000
9/13/2010	5:51:35 PM	H2 MFC set to  500.000000
9/13/2010	5:51:35 PM	BCl3 MFC set to  0.000000
9/13/2010	5:51:35 PM	PHl3 MFC set to  0.000000
9/13/2010	5:51:35 PM	SiCl4 MFC set to  0.000000
9/13/2010	5:51:35 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	5:51:35 PM	Tube furnace set to 1000
9/13/2010	6:11:35 PM	Helium valve closed
9/13/2010	6:11:35 PM	BCl3 valve closed
9/13/2010	6:11:35 PM	Main Vac valve closed
9/13/2010	6:11:35 PM	Bypass valve closed
9/13/2010	6:11:35 PM	H2 valve opened
9/13/2010	6:11:35 PM	PH3 valve opened
9/13/2010	6:11:35 PM	SiCl4 pre valve opened
9/13/2010	6:11:35 PM	SiCl4 post valve opened
9/13/2010	6:11:35 PM	Bubbler valve opened
9/13/2010	6:11:35 PM	Helium MFC set to  0.000000
9/13/2010	6:11:35 PM	H2 MFC set to  500.000000
9/13/2010	6:11:35 PM	BCl3 MFC set to  0.000000
9/13/2010	6:11:35 PM	PHl3 MFC set to  1.000000
9/13/2010	6:11:35 PM	SiCl4 MFC set to  50.000000
9/13/2010	6:11:35 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	6:11:36 PM	Tube furnace set to 1000
9/13/2010	6:31:35 PM	H2 valve closed
9/13/2010	6:31:35 PM	BCl3 valve closed
9/13/2010	6:31:36 PM	PH3 valve closed
9/13/2010	6:31:36 PM	SiCl4 pre valve closed
9/13/2010	6:31:36 PM	SiCl4 post valve closed
9/13/2010	6:31:36 PM	Main Vac valve closed
9/13/2010	6:31:36 PM	Bypass valve closed
9/13/2010	6:31:36 PM	Helium valve opened
9/13/2010	6:31:36 PM	Bubbler valve opened
9/13/2010	6:31:36 PM	Helium MFC set to  500.000000
9/13/2010	6:31:36 PM	H2 MFC set to  0.000000
9/13/2010	6:31:36 PM	BCl3 MFC set to  0.000000
9/13/2010	6:31:36 PM	PHl3 MFC set to  0.000000
9/13/2010	6:31:36 PM	SiCl4 MFC set to  0.000000
9/13/2010	6:31:36 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	6:31:36 PM	Tube furnace set to 0
9/13/2010	6:51:36 PM	Helium valve closed
9/13/2010	6:51:36 PM	H2 valve closed
9/13/2010	6:51:36 PM	BCl3 valve closed
9/13/2010	6:51:36 PM	PH3 valve closed
9/13/2010	6:51:36 PM	SiCl4 pre valve closed
9/13/2010	6:51:36 PM	SiCl4 post valve closed
9/13/2010	6:51:36 PM	Main Vac valve closed
9/13/2010	6:51:36 PM	Bypass valve closed
9/13/2010	6:51:36 PM	Bubbler valve closed
9/13/2010	6:51:36 PM	Helium MFC set to  0.000000
9/13/2010	6:51:36 PM	H2 MFC set to  0.000000
9/13/2010	6:51:36 PM	BCl3 MFC set to  0.000000
9/13/2010	6:51:36 PM	PHl3 MFC set to  0.000000
9/13/2010	6:51:36 PM	SiCl4 MFC set to  0.000000
9/13/2010	6:51:36 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	6:51:36 PM	Tube furnace set to 0
9/13/2010	6:51:36 PM	Run finished at 6:51 PM
9/13/2010	7:06:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/13/2010	7:06:03 PM	Recipe started at 7:06 PM
9/13/2010	7:06:03 PM	H2 valve closed
9/13/2010	7:06:03 PM	BCl3 valve closed
9/13/2010	7:06:03 PM	PH3 valve closed
9/13/2010	7:06:03 PM	SiCl4 pre valve closed
9/13/2010	7:06:03 PM	SiCl4 post valve closed
9/13/2010	7:06:03 PM	Main Vac valve closed
9/13/2010	7:06:03 PM	Bypass valve closed
9/13/2010	7:06:03 PM	Bubbler valve closed
9/13/2010	7:06:03 PM	Helium valve opened
9/13/2010	7:06:03 PM	Helium MFC set to  500.000000
9/13/2010	7:06:03 PM	H2 MFC set to  0.000000
9/13/2010	7:06:03 PM	BCl3 MFC set to  0.000000
9/13/2010	7:06:03 PM	PHl3 MFC set to  0.000000
9/13/2010	7:06:03 PM	SiCl4 MFC set to  0.000000
9/13/2010	7:06:03 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	7:06:03 PM	Tube furnace set to 0
9/13/2010	7:06:08 PM	Helium valve closed
9/13/2010	7:06:08 PM	H2 valve closed
9/13/2010	7:06:08 PM	BCl3 valve closed
9/13/2010	7:06:08 PM	PH3 valve closed
9/13/2010	7:06:08 PM	SiCl4 pre valve closed
9/13/2010	7:06:08 PM	SiCl4 post valve closed
9/13/2010	7:06:08 PM	Main Vac valve closed
9/13/2010	7:06:08 PM	Bypass valve closed
9/13/2010	7:06:08 PM	Bubbler valve closed
9/13/2010	7:06:08 PM	Helium MFC set to  0.000000
9/13/2010	7:06:08 PM	H2 MFC set to  0.000000
9/13/2010	7:06:08 PM	BCl3 MFC set to  0.000000
9/13/2010	7:06:08 PM	PHl3 MFC set to  0.000000
9/13/2010	7:06:08 PM	SiCl4 MFC set to  0.000000
9/13/2010	7:06:08 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	7:06:09 PM	Tube furnace set to 0
9/13/2010	7:06:09 PM	Run finished at 7:06 PM
9/13/2010	7:06:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/13/2010	7:09:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/13/2010	7:09:39 PM	Recipe started at 7:09 PM
9/13/2010	7:09:39 PM	Helium valve closed
9/13/2010	7:09:39 PM	H2 valve closed
9/13/2010	7:09:39 PM	BCl3 valve closed
9/13/2010	7:09:39 PM	PH3 valve closed
9/13/2010	7:09:39 PM	SiCl4 pre valve closed
9/13/2010	7:09:39 PM	SiCl4 post valve closed
9/13/2010	7:09:39 PM	Main Vac valve closed
9/13/2010	7:09:39 PM	Bubbler valve closed
9/13/2010	7:09:39 PM	Bypass valve opened
9/13/2010	7:09:39 PM	Helium MFC set to  0.000000
9/13/2010	7:09:39 PM	H2 MFC set to  0.000000
9/13/2010	7:09:39 PM	BCl3 MFC set to  0.000000
9/13/2010	7:09:39 PM	PHl3 MFC set to  0.000000
9/13/2010	7:09:39 PM	SiCl4 MFC set to  0.000000
9/13/2010	7:09:39 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	7:09:39 PM	Tube furnace set to 0
9/13/2010	7:10:19 PM	Helium valve closed
9/13/2010	7:10:19 PM	H2 valve closed
9/13/2010	7:10:19 PM	BCl3 valve closed
9/13/2010	7:10:19 PM	PH3 valve closed
9/13/2010	7:10:19 PM	SiCl4 pre valve closed
9/13/2010	7:10:19 PM	SiCl4 post valve closed
9/13/2010	7:10:19 PM	Bubbler valve closed
9/13/2010	7:10:19 PM	Main Vac valve opened
9/13/2010	7:10:19 PM	Bypass valve opened
9/13/2010	7:10:19 PM	Helium MFC set to  0.000000
9/13/2010	7:10:19 PM	H2 MFC set to  0.000000
9/13/2010	7:10:19 PM	BCl3 MFC set to  0.000000
9/13/2010	7:10:19 PM	PHl3 MFC set to  0.000000
9/13/2010	7:10:19 PM	SiCl4 MFC set to  0.000000
9/13/2010	7:10:19 PM	Bypass solenoid MFC set to  0.000000
9/13/2010	7:10:20 PM	Tube furnace set to 0
9/13/2010	7:10:20 PM	Run finished at 7:10 PM
9/13/2010	7:10:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
